Mask appearance defect detection system, method and device and storage medium
A technology for appearance defects and defect locations, which is applied in the field of devices, storage media, methods, and mask appearance defect detection systems, can solve a large number of problems such as detection accuracy of quality inspectors, human subjective influence, and difficulty in achieving efficient automatic detection, and achieves a reduction in the huge number of problems. Sample requirements, the effect of improving coverage and precision, and improving flexibility and stability
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Embodiment 1
[0027] According to this embodiment, an embodiment of a mask appearance defect detection method is provided. It should be noted that the steps shown in the flow chart of the accompanying drawings can be executed in a computer system such as a set of computer-executable instructions, and, although A logical order is shown in the flowcharts, but in some cases the steps shown or described may be performed in an order different from that shown or described herein.
[0028] The method embodiments provided in this embodiment can be executed in a server or similar computing devices. figure 1 A block diagram of a hardware structure of a computing device for implementing a method for detecting defects in the appearance of a mask is shown. Such as figure 1 As shown, the computing device may include one or more processors (processors may include but not limited to processing devices such as microprocessors MCUs or programmable logic devices FPGAs), memory for storing data, and memory fo...
Embodiment 2
[0087] Figure 11 Shown is the mask appearance defect detection device 1100 according to this embodiment, and the device 1100 corresponds to the method according to the second aspect of the first embodiment. refer to Figure 11 As shown, the device 1100 includes: an acquisition module 1110 for acquiring a mask image of a mask to be detected for appearance defects; a determination module 1120 for determining whether there is an appearance defect in the mask according to the mask image; a detection module 1130 for determining whether there is an appearance defect in the mask In the case that there is an appearance defect in the mask, the mask image is detected using a pre-trained appearance defect detection model to determine the defect position information of the appearance defect in the mask image; and a model optimization module 1140 is also included for performing an appearance defect detection model Optimizing, wherein the model optimization module 1140 includes: generatin...
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