High-precision horizontal-axis silicon micro-gyroscope based on tuning fork driving effect

Abstract

The invention discloses a high-precision horizontal-axis silicon micro-gyroscope based on a tuning fork driving effect. The high-precision horizontal-axis silicon micro-gyroscope comprises a cap layer, a gyroscope sensitive structure and a substrate layer, wherein the cap layer and the substrate layer are connected to form an internal vacuum structure, and the gyroscope sensitive structure is arranged in the internal vacuum structure; the gyroscope sensitive structure comprises a first driving comb tooth group, a second driving comb tooth group, a third driving comb tooth group, a fourth driving comb tooth group, a first driving detection comb tooth, a second driving detection comb tooth, a third driving detection comb tooth, a fourth driving detection comb tooth, a first driving elastic beam group, a second driving elastic beam group, a first detection elastic beam group, a second detection elastic beam group, an anchor area group, a first mass block, a second mass block, a coupling elastic beam, a first driving frame and a second driving frame. According to the invention, measurement of pitching and rolling angular rates is realized, and the size of an inertial measurement unit is reduced.

Description

technical field [0001] The invention belongs to the technical field of micro-mechanical inertial instruments, and in particular relates to a high-precision horizontal-axis silicon micro-gyroscope based on the tuning fork driving effect, which can be applied to systems such as guided bombs, portable anti-aircraft missiles, mobile devices, unmanned aerial vehicles, and navigation equipment. It is used to measure the angular rate of rotation of the carrier around a fixed axis relative to the inertial space. Background technique [0002] The gyroscope is a sensor that measures the rotational motion of the carrier relative to the inertial space. It is the core device in the fields of motion measurement, inertial navigation, guidance and control, etc. It is very important in high-end industrial equipment and precision strike weapons such as aerospace, unmanned driving, and guided munitions. application value. With the continuous development of application fields such as individua...

AI Technical Summary

Problems solved by technology

This placement leads to an increase in the volume of the inertial measurement unit, which is not conducive to the miniaturization of the micro-inertial system

However, there is still a big gap between the accuracy and integration of domestic single-chip integrated three-axis gyroscopes compared with foreign advanced technologies, which greatly limits the development and application of domestic micro-inertial devices. The coupling degree of the direction is high, which is not conducive to high-precision measurement

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