A kind of indium tin alloy target and preparation method thereof

An indium tin alloy and target technology, applied in metal rolling, metal rolling, metal processing equipment and other directions, can solve problems such as adverse effects on film properties, and achieve high target blank purity, good sputtering effect, and uniform composition. good effect
CN111809152BActive Publication Date: 2022-08-05XIANDAO THIN FILM MATERIALS GUANGDONG CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
XIANDAO THIN FILM MATERIALS GUANGDONG CO LTD
Publication Date
2022-08-05

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Abstract

The invention discloses a method for preparing an indium-tin alloy target material, which comprises the following steps: putting metal indium and metal tin into a crucible, heating and melting, and stirring until the melt composition is uniform; casting the melt into a shape to obtain an indium-tin alloy cast iron. ingot; rolling the ingot of indium tin alloy to obtain indium tin alloy billet; processing the indium tin alloy billet to a rough target billet thicker than the target size, and processing the binding surface of the rough target billet to be smooth; The plate and the rough target blank are respectively heated and kept at a temperature lower than the critical melting point of the rough target blank, then the two are clamped together and gradually cooled to room temperature. After the binding is qualified, the rough target blank is processed to the target size. The invention can realize the rapid mass production of indium tin targets, there is no melting medium between the target blank and the back plate, the target blank is high in purity, the grain size is uniform and the particle size is small, the average particle size is 100-150 μm, and the composition is uniform. Good, the indium tin composition deviation is less than ±0.5%, and the sputtering effect is good.
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Description

technical field

[0001] The invention belongs to the technical field of thin film materials, and in particular relates to an indium tin alloy target material and a preparation method thereof. Background technique

[0002] With the development of communication technology, 5G communication has begun to be popularized and used. The remarkable feature of 5G signal is that the signal transmission speed is faster, and its transmission speed is 10 to 100 times that of 4G, which greatly facilitates people's lives.

[0003] 5G communication uses a spectrum above 3Ghz, and its millimeter-wave wavelength is very short. In order to reduce the attenuation of the signal reception and transmission process, the mobile phone casing is generally made of glass or engineering plastics. However, because consumers prefer metallic luster, for high-end mobile phones, manufacturers will apply magnetron sputtering technology to coat a 1-10 micron film on the mobile phone casing. This can not only giv...

Claims

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