Silicon pixel detector with single-sided cathode of spiral ring structure and array of silicon pixel detector

Abstract

The invention discloses a silicon pixel detector with a single-sided cathode of a spiral ring structure and an array of the silicon pixel detector. The detector comprises an N-type high-resistance silicon substrate, a SiO2 oxide layer is generated on the top surface of the N-type high-resistance silicon substrate; a P + heavily doped cathode spiral ring structure is formed on the SiO2 oxide layerthrough etching and ion implantation; the P + heavily-doped cathode spiral ring structure is a planar spiral ring structure, a collecting cathode connected with the P + heavily-doped cathode spiral ring structure is arranged in the center of the P + heavily-doped cathode spiral ring structure, and an n + heavily-doped ion implantation layer is formed on the bottom surface of the N-type high-resistance silicon substrate through etching and ion implantation. The P + heavily doped cathode spiral ring structure spirally extends outwards to the edge of any side of the SiO2 oxide layer anticlockwisein a square or polygonal manner by taking the collecting cathode as an initial position. The silicon pixel detector with the single-sided cathode of the spiral ring structure forms a silicon pixel detector array with the single-sided cathode of the spiral ring structure. The effective working area of the detector is reduced, and the advantage of low capacitance of the detector is ensured.

Description

technical field [0001] The invention belongs to the technical field of radiation detection, and relates to a silicon pixel detector with a single-sided cathode having a spiral ring structure and an array thereof. Background technique [0002] Silicon Pixel Detector is developed for atomic physics, nuclear physics and elementary particle physics. Now, silicon pixel detectors have been widely used in deep space detection, medical imaging, particle trajectory detection in high-energy physics, food safety detection, and radiation source detection for national security. [0003] The silicon pixel detector is a particle track detector with silicon as the detection material, which is used to detect the track and determine the energy of high-energy particles. These high-energy particles include those produced by nuclear decay, cosmic radiation, and particles produced by accelerator interactions. To detect radiation, detectors must interact with matter and this interaction must be ...

AI Technical Summary

Problems solved by technology

[0005] The purpose of the embodiments of the present invention is to provide a silicon pixel detector with a single-sided cathode as a spiral ring structure and its array, so as to solve the problems of large detector noise and reduced signal-to-noise ratio caused by the large effective area of ​​existing detectors

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