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Preparation process of photoacid generator

A photoacid generator and preparation technology, applied in photosensitive materials used in optomechanical equipment, compounds of group 5/15 elements of the periodic table, chemical instruments and methods, etc., can solve poor mixing effect and material mixing efficiency Low, volatile materials and other problems, to achieve the effect of not being volatile, improving the mixing effect and mixing efficiency, and reducing production costs

Pending Publication Date: 2020-11-03
TIANJIN QUANHECHENG TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] At present, the preparation process of photoacid generators still has the following problems: 1. The materials are volatile during the production process; 2. The mixing effect is poor, and the material mixing efficiency is low

Method used

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  • Preparation process of photoacid generator

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Experimental program
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Effect test

Embodiment 1

[0029] Such as figure 1 and figure 2 Shown, the preparation technology of a kind of photoacid generator of the present invention, this photoacid generator is made of aminotrimethylene phosphonic acid, thioformamide, sodium methylate and methyl trifluorosulfonate, and aminotrimethylene The molar ratio between phosphonic acid, thioformamide, sodium methoxide and methyl trifluorosulfonate is 4:3:1:1.5.

[0030] Among them, specifically include the following steps:

[0031] S1. Weighing: Weigh the corresponding mass of materials according to the above molar ratio, and put them into containers respectively;

[0032] S2. Mixing: Pour the weighed aminotrimethylene phosphonic acid, thioformamide and methyl trifluorosulfonate into the mixing container. Before mixing, pass low-temperature protective gas into the mixing container, and The mixing container is cooled, and the aminotrimethylene phosphonic acid and thioformamide are stirred with a stirring paddle to accelerate the mixing...

Embodiment 2

[0042] Such as figure 1 and figure 2 Shown, the preparation technology of a kind of photoacid generator of the present invention, this photoacid generator is made of aminotrimethylene phosphonic acid, thioformamide, sodium methylate and methyl trifluorosulfonate, and aminotrimethylene The molar ratio between phosphonic acid, thioformamide, sodium methoxide and methyl trifluorosulfonate is 4:3:1:1.5.

[0043] Among them, specifically include the following steps:

[0044] S1. Weighing: Weigh the corresponding mass of materials according to the above molar ratio, and put them into containers respectively;

[0045] S2. Mixing: Pour the weighed aminotrimethylene phosphonic acid, thioformamide and methyl trifluorosulfonate into the mixing container. Before mixing, pass low-temperature protective gas into the mixing container, and The mixing container is cooled, and the aminotrimethylene phosphonic acid and thioformamide are stirred with a stirring paddle to accelerate the mixing...

Embodiment 3

[0055] Such as figure 1 and figure 2 Shown, the preparation technology of a kind of photoacid generator of the present invention, this photoacid generator is made of aminotrimethylene phosphonic acid, thioformamide, sodium methylate and methyl trifluorosulfonate, and aminotrimethylene The molar ratio between phosphonic acid, thioformamide, sodium methoxide and methyl trifluorosulfonate is 4:3:1:1.5.

[0056] Among them, specifically include the following steps:

[0057] S1. Weighing: Weigh the corresponding mass of materials according to the above molar ratio, and put them into containers respectively;

[0058] S2. Mixing: Pour the weighed aminotrimethylene phosphonic acid, thioformamide and methyl trifluorosulfonate into the mixing container. Before mixing, pass low-temperature protective gas into the mixing container, and The mixing container is cooled, and the aminotrimethylene phosphonic acid and thioformamide are stirred with a stirring paddle to accelerate the mixing...

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Abstract

The invention discloses a preparation process of a photoacid generator, wherein the photoacid generator is prepared from amino trimethylene phosphonic acid, thioformamide, sodium methoxide and methyltrifluorosulfonate; the molar ratio of the amino trimethylene phosphonic acid to the thioformamide to the sodium methoxide to the methyl trifluorosulfonate is 4:3:1:1.5. According to the preparation process of the photoacid generator, nitrogen does not react with amino trimethylene phosphonic acid and thioformamide, so that the photoacid generator is colorless, odorless and low in price, and the production cost is reduced; in addition, sodium methoxide is used as a catalyst and has an excellent catalytic effect on production of sulfonamide substances, and thereby the mixed reaction of amino trimethylene phosphonic acid and thioformamide is accelerated. Besides, the yield can reach 80%, and the mixing effect and the mixing efficiency are improved.

Description

technical field [0001] The invention relates to a preparation process, in particular to a preparation process of a photoacid generator. Background technique [0002] A photoacid generator is a light-sensitive compound that decomposes under light to generate acids (H+). During the post-exposure bake (PEB) process, these acids will act as catalysts to make the acid-labile groups suspended on the polymer The detachment and generation of new acid, the detachment of the pendant group changes the polarity of the polymer, and after enough pendant groups are detached, the photoresist can be dissolved in the developer. [0003] At present, the following problems still exist in the preparation process of photoacid generators: 1. The materials are easily volatilized during the production process; 2. The mixing effect is poor and the mixing efficiency of materials is low. Therefore, we improve this and propose a preparation process of a photoacid generator. Contents of the invention ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C07F9/44G03F7/004
CPCC07F9/4461C07F9/4492G03F7/004
Inventor 崔昭山李静简
Owner TIANJIN QUANHECHENG TECH
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