Transparent conductive oxide light transmittance adjustable multilayer metasurface based on guided mode resonance

Abstract

The invention discloses a transparent conductive oxide light transmittance adjustable multilayer metasurface based on guided-mode resonance, which is characterized by comprising a substrate layer, n guided-mode resonance metasurface layers and n-1 dielectric layers from bottom to top, wherein one dielectric layer is filled between every two adjacent guided-mode resonance metasurface layers; the guided-mode resonance metasurface layer comprises a silicon medium flat plate (7), grooves are periodically etched in the silicon medium flat plate (7), the depth of the grooves is the same as the thickness of the silicon medium flat plate (7), the two sides of each groove are filled with medium layers (8), and the middle of each groove is filled with a transparent conductive oxide layer (9); each silicon dielectric flat plate (7) is provided with a first electrode, and each transparent conductive oxide layer (9) is provided with a second electrode, wherein n is an integer greater than or equalto 2. On the basis of the guided mode resonance principle, higher design freedom degree is provided, the transparent conductive oxide light transmittance adjustable multilayer metasurfacecan be used for more complex optical control, and the method has wide application prospects in the field of future optical device integration.

Description

technical field [0001] The invention relates to the fields of optical communication, optical interconnection and optical device integration, specifically, a multilayer metasurface with adjustable light transmittance of transparent conductive oxide (Transparent-Conducting-Oxide, TCO) based on guided mode resonance. Background technique [0002] Electromagnetic metasurfaces, man-made materials with wavelength-scale thickness that can be artificially tuned on demand, offer a promising solution for controlling the local amplitude, phase, and polarization of incident waves, thereby opening up new possibilities in wavefront control. new way. These structures are typically much thinner than conventional optical components and are more sensitive to changes in the dielectric environment due to resonance. These structures are compatible with standard microelectronics processing techniques and enable large-area, low-cost fabrication. In recent years, passive metasurfaces have flouris...

AI Technical Summary

Problems solved by technology

However, most of them work in the reflective mode, and the design freedom in the single-layer structure is limited, which makes it face problems such as narrow bandwidth and polarization correlation.

This limits its application in more complex surface photonics

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