Transparent Conductive Oxide Optical Transmittance Tunable Multilayer Metasurface Based on Guided Mode Resonance

Abstract

The invention discloses a transparent conductive oxide multilayer metasurface with adjustable light transmittance based on guided mode resonance, which is characterized in that it includes a base layer, n guided mode resonance metasurface layers and n-1 from bottom to top A dielectric layer, wherein a dielectric layer is filled between two adjacent guided-mode resonance metasurface layers; the guided-mode resonance metasurface layer includes a silicon dielectric flat plate (7), and grooves are periodically etched on the silicon dielectric flat plate (7). The depth of the groove is the same as the thickness of the silicon dielectric plate (7), and the two sides of each groove are filled with a dielectric layer (8), and the middle is filled with a transparent conductive oxide layer (9); each silicon medium plate (7) is provided with a first For electrodes, each transparent conductive oxide layer (9) is provided with a second electrode; n is an integer greater than or equal to 2. Based on the principle of guided mode resonance, the invention provides a higher degree of design freedom, can be used for more complex optical manipulation, and has broad application prospects in the field of optical device integration in the future.

Description

technical field [0001] The invention relates to the fields of optical communication, optical interconnection and optical device integration, specifically, a multilayer metasurface with adjustable light transmittance of transparent conductive oxide (Transparent-Conducting-Oxide, TCO) based on guided mode resonance. Background technique [0002] Electromagnetic metasurfaces, man-made materials with wavelength-scale thickness that can be artificially tuned on demand, offer a promising solution for controlling the local amplitude, phase, and polarization of incident waves, thereby opening up new possibilities in wavefront control. new way. These structures are typically much thinner than conventional optical components and are more sensitive to changes in the dielectric environment due to resonance. These structures are compatible with standard microelectronics processing techniques and enable large-area, low-cost fabrication. In recent years, passive metasurfaces have flouris...

AI Technical Summary

Problems solved by technology

However, most of them work in the reflective mode, and the design freedom in the single-layer structure is limited, which makes it face problems such as narrow bandwidth and polarization correlation.

This limits its application in more complex surface photonics

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