Heater for semiconductor graphite thermal field and heating method thereof

A technology for semiconductors and heaters, applied in chemical instruments and methods, crystal growth, and self-melting liquid pulling methods, etc., can solve problems such as thread and thread hole damage, bolts are not easy to disassemble, etc., to improve stability and avoid repetition The effect of removing bolts

Inactive Publication Date: 2020-11-13
DATONG XINCHENG NEW MATERIAL CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] At present, most of the existing heaters use bolts to connect the heater body and the sealing cover. When discharging and retrieving materials, the sealing cover needs to be opened frequently. Frequent use of bolts will easily cause damage to the threads and threaded holes. Using bolts Not easy to disassemble

Method used

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  • Heater for semiconductor graphite thermal field and heating method thereof
  • Heater for semiconductor graphite thermal field and heating method thereof
  • Heater for semiconductor graphite thermal field and heating method thereof

Examples

Experimental program
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Embodiment 1

[0031] Embodiment 1: In order to solve the problem that the bolt is difficult to disassemble and improve the stability of crucible heating, a heater for the semiconductor graphite thermal field is proposed in this embodiment, see Figure 1-4 , including a base plate 1, an ignition mechanism, a clamping mechanism, a drive mechanism, and a hinge mechanism. The base plate 1 is a rectangular plate placed horizontally and horizontally. The four corners of the bottom surface of the base plate 1 are provided with support columns 11, which are located at the support Between the columns 11, an ignition mechanism is provided on the bottom surface of the bottom plate 1; the top surface of the bottom plate 1 is provided with an outer cylinder 2 placed vertically and the top surface is open, and the inner top of the outer cylinder 2 is provided with a crucible 3 placed vertically, A pair of clamping mechanisms are provided on the outer cylinder 2 on both sides of the bottom of the crucible ...

Embodiment 2

[0036] Example 2: see Figure 5 , in the present embodiment, the present invention also proposes the heating method of the heater that semiconductor graphite thermal field is used, comprises the following steps:

[0037] Step 1, the hinged cylinder 17, clamping telescopic cylinder 22, drive motor 36, fixed telescopic cylinder 25, and positioning telescopic cylinder 28 are electrically connected to the external power supply through the external power line in turn; pour the graphite material to be heated into the crucible 3;

[0038] Step 2, after the graphite material is poured in, the crucible 3 is controlled to slightly swing and oscillate back and forth through the driving mechanism, and the driving motor 36 is controlled to start, and the motor shaft of the driving motor 36 drives the driving belt 38 to rotate synchronously through the first pulley 37, and then passes through the second The belt pulley 39 drives the driving shaft 34 to rotate in the drum 35, and then drives...

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PUM

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Abstract

The invention discloses a heater for a semiconductor graphite thermal field. The heater comprises a bottom plate, an ignition mechanism, a clamping mechanism, a driving mechanism and a hinge mechanism. A bottom plate is a horizontally and transversely placed rectangular plate, support columns are arranged at four corners of the bottom surface of the bottom plate, and the ignition mechanism is arranged on the bottom surface of the bottom plate between the support columns. An outer barrel is arranged on the top face of the bottom plate, a crucible is arranged at the top in the outer barrel, a pair of clamping mechanisms are arranged on the outer barrel and located on the two sides of the bottom of the crucible, the crucible is movably connected with the outer barrel through the driving mechanism, an outer cover is arranged at an opening in the top face of the outer barrel and movably hinged to the outer barrel through the hinge mechanism, and a crucible cover is arranged on the bottom face of the outer cover. The invention further discloses a heating method of the heater for a semiconductor graphite thermal field. The problem that bolts are not easy to disassemble and assemble is solved, inconvenience in secondary use of the crucible heater due to repeated disassembly of the bolts is avoided, and the heating stability of the crucible is improved through cooperative use of all mechanisms.

Description

technical field [0001] The invention relates to the technical field of graphite heat field heating, in particular to a heater for a semiconductor graphite heat field and a heating method thereof. Background technique [0002] The graphite thermal field system includes a heating system and a support system. The graphite crucible supports the quartz crucible. Polysilicon is packed in the quartz crucible, heated to 1420 degrees, melted into silicon melt, and crystallized, that is, single crystal growth. [0003] At present, most of the existing heaters use bolts to connect the heater body and the sealing cover. When discharging and retrieving materials, the sealing cover needs to be opened frequently. Frequent use of bolts will easily cause damage to the threads and threaded holes. Using bolts Not easy to disassemble. Contents of the invention [0004] The object of the present invention is to solve the shortcomings in the prior art, and propose a heater for the semiconducto...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C30B15/14C30B29/06
CPCC30B15/14C30B29/06
Inventor 柴利春张培林武建军张作文王志辉
Owner DATONG XINCHENG NEW MATERIAL CO LTD
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