Full-flexible capacitive three-dimensional force tactile sensor based on corrugated pipe microstructure
A tactile sensor, bellows technology, applied in the direction of instruments, measuring force, measuring devices, etc., can solve the problems of inability to effectively perceive all external information, inability to meet the limitations of intelligent robots, three-dimensional force tactile sensors, etc., and achieve excellent application effects. , 3D force perception response speed and sensitivity improvement, the effect of increasing the dielectric constant
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Embodiment 1
[0021] Such as Figure 1-Figure 2 As shown, this embodiment provides a fully flexible capacitive three-dimensional force tactile sensor based on bellows microstructure, including a hemispherical hollow contact 1, a flexible circular common electrode 2, and an "hourglass-shaped" air sensor with a bellows structure. Cavity 3, flexible fan-shaped excitation electrode 4 and flexible substrate 5, supported by flexible substrate 5, in the "hourglass-shaped" air cavity 3 with a bellows structure, silicone rubber is used as an adhesive to connect the flexible circular common electrode 2 and The flexible fan-shaped excitation electrode 4 is covered by a hemispherical hollow contact 1 on the top. The overall structure from top to bottom is: hemispherical hollow contact 1, flexible circular common electrode 2, "hourglass-shaped" air cavity 3 with bellows structure, flexible fan-shaped excitation electrode 4 and flexible substrate 5.
[0022]Wherein, the flexible base 5 is generally in t...
Embodiment 2
[0029] Such as Figure 1-Figure 7 As shown, this embodiment provides a fully flexible capacitive three-dimensional force tactile sensor based on the bellows microstructure. In this embodiment, the "hourglass-shaped" air cavity 3 with a bellows structure includes an integrated The bowl-shaped structure 3-1 after removing the flexible circular common electrode 2, the bellows structure 3-2, and the inverted bowl-shaped structure 3-3 after removing the flexible sector-shaped excitation electrode 4, the bowl-shaped structure 3-1 is located in the bellows structure 3- 2, the inverted bowl-shaped structure 3-3 is located at the lower part of the bellows structure 3-2, and the three are connected in turn to form an "hourglass-shaped" air cavity.
Embodiment 3
[0031] Such as Figure 1-Figure 7 As shown, this embodiment provides a fully flexible capacitive three-dimensional force tactile sensor based on the bellows microstructure. In this embodiment, the flexible substrate 5 includes a flexible circular sheet substrate 5-1 and a flexible annular concave Between the groove 5-2, the flexible circular sheet substrate 5-1 and the hemispherical hollow contact 1, silicone rubber is used as an adhesive to connect the two.
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