Low-temperature-drift relative plane mounting differential integrated resonant accelerometer

Abstract

The invention discloses a low-temperature-drift relative plane mounting differential integrated resonant accelerometer. The accelerometer comprises a metal base, a first double-end clamped quartz tuning fork and a second double-end clamped quartz tuning fork, the metal base comprises a metal base, a first flexible hinge, a second flexible hinge, a mass block and a metal outer frame, the mass blockis connected with the metal base through the first flexible hinge and the second flexible hinge, and the left side, the right side and the front side of the metal base are connected with the metal outer frame; the first double-end clamped quartz tuning fork and the second double-end clamped quartz tuning fork have the same structure, are attached to the front surface and the back surface of the metal base and are arranged in a differential mode; the first flexible hinge and the second flexible hinge have elastic characteristics in a sensitive direction SA. The accelerometer can reduce the influence of packaging stress and thermal stress on the output of the accelerometer, and has the advantages of high sensitivity, small temperature drift, high precision, small size and the like.

Description

technical field [0001] The invention belongs to the technical field of micro-mechanical electronics (MEMS) digital accelerometers, and in particular relates to a low-temperature drift relative plane mounting differential type integrated resonant accelerometer. Background technique [0002] The microresonant accelerometer does not need an analog-to-digital conversion module, and converts acceleration into frequency output. It has the advantages of good reliability, high precision, and fast response. It has been widely used in aerospace, inertial navigation, and intelligent equipment manufacturing. The microresonant accelerometer is generally composed of a spring-mass system and a micro-resonator. The acceleration acts on the micro-resonator through the spring-mass system, causing the natural frequency of the micro-resonator to change. The frequency change value can be measured by the peripheral test system. Calculate the value of the acceleration and realize the digital outpu...

AI Technical Summary

Problems solved by technology

However, since the two quartz tuning forks cannot guarantee complete consistency in the process, the differential arrangement cannot completely eliminate the error caused by the thermal stress on the accelerometer

[0004] The integrated micro-resonant accelerometer manufactures the spring-mass system and the micro-resonator separately, and integrates them using the micro-assembly process, which has the advantages of simple processing and strong anti-interference ability. The design will greatly increase the difficulty of implementing micro-assembly processes such as bonding gold wires and bonding; and packaging stress will be generated during the micro-assembly and packaging process, which will greatly reduce the basic accuracy of the accelerometer

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