Triboelectric pressure sensor and preparation method thereof

Abstract

The invention provides a triboelectric pressure sensor and a preparation method thereof. The preparation method comprises the following steps: providing a mold with a concave cavity, and putting magnetic fluid into the concave cavity; placing a permanent magnet below the mold, so that the shape of the magnetic fluid is changed into a plurality of permanent magnet tip structures which are arrangedin an array mode under a magnetic field generated by the permanent magnet; applying a curable polymer mixed solution into the cavity, immersing the plurality of permanent magnet tip structures, and performing stripping operation after the curable polymer mixed solution is completely cured to obtain a polymer template; filling a polymer template with the stretchable material precursor, and carryingout stripping operation after the stretchable material precursor is completely cured, so as to obtain a stretchable friction layer of which the first surface is provided with a plurality of frictionlayer tip structures arranged in an array manner; and assembling the stretchable friction layer, the spacer layer, the first electrode layer and the second electrode layer to prepare the triboelectricpressure sensor. The triboelectric pressure sensor has relatively high sensitivity.

Description

technical field [0001] The invention relates to the technical field of sensors, in particular to a triboelectric pressure sensor and a preparation method thereof. Background technique [0002] With the increasing development and popularization of 5G technology, the Internet of Things era with "Internet of Everything" as the core is gradually coming. As an essential part of the Internet of Things system, the triboelectric pressure sensor has attracted more and more attention. However, most of the existing triboelectric pressure sensors have disadvantages such as low sensitivity, insufficient spatial resolution, and the need for external power supply. It is difficult to meet the development trend of miniaturization and intelligence, which greatly limits their practical applications. [0003] The triboelectric nanogenerator can convert physical signals such as external pressure stimuli into electrical signal output in real time, without any external energy supply, and provides...

AI Technical Summary

Problems solved by technology

During the contact / separation process of the triboelectric nanogenerator, the verticality causes the interfacial contact area where the triboelectric function usually does not exceed the total area of ​​the top of the microstructure, which is significantly smaller than the apparent area of ​​the tribofilm, which significantly reduces the triboelectric nanogenerator. output, which in turn affects its sensitivity as a triboelectric pressure sensor

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