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Preparation method of microstructure with constant aspect ratio and PDMS elastomer

A microstructure and aspect ratio technology, applied in microstructure technology, microstructure devices, manufacturing microstructure devices, etc., can solve the problem of high preparation cost of small batch test products, difficult to process arc-shaped microstructures, and time-consuming microstructure processing. and other problems, to achieve the effect of easy operation, good practicability, and conducive to popularization and application.

Pending Publication Date: 2020-12-22
SHANGHAI UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] Although the existing methods for preparing microstructures can realize the preparation of microstructures, they also have complex preparation processes, long time-consuming microstructure processing, high preparation costs for small-batch test products, difficulty in processing arc-shaped microstructures, and continuous changes. It is difficult to prepare a microchannel structure with a constant aspect ratio and many other shortcomings
Among them, taking the traditional microchannel structure used in microfluidic chips as an example, its cross-section is usually rectangular, which has certain shortcomings when performing more complex microfluidic environment simulations.

Method used

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  • Preparation method of microstructure with constant aspect ratio and PDMS elastomer
  • Preparation method of microstructure with constant aspect ratio and PDMS elastomer
  • Preparation method of microstructure with constant aspect ratio and PDMS elastomer

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Embodiment Construction

[0036] It should be noted that, in the case of no conflict, the embodiments of the present invention and the features in the embodiments can be combined with each other.

[0037] The present invention will be described in detail below with reference to the accompanying drawings and examples.

[0038] This embodiment firstly relates to a preparation method of a microstructure with a constant aspect ratio. The method as a whole is to first prepare a substrate with a microstructure pattern on the surface by selective exposure by photolithography, and then fill the microstructure pattern with a sacrificial layer. liquid, and finally pour the PDMS and let the PDMS cure to obtain a constant aspect ratio microstructure.

[0039] Specifically, in combination with figure 1 As shown in , for the preparation of substrates with microstructure patterns, the surface of the substrate is firstly modified with perfluorooctyltriethoxysilane to make the surface of the modified substrate lyophob...

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Abstract

The invention provides a preparation method of a microstructure with a constant aspect ratio, which comprises the following steps: preparing a substrate with a microstructure pattern on the surface through selective exposure by using a photoetching method, filling sacrificial layer liquid into the microstructure pattern, pouring PDMS, and curing to obtain the microstructure with the constant aspect ratio. Meanwhile, the invention also provides the PDMS elastomer with the microstructure prepared by the method. According to the preparation method, the microstructure with the constant aspect ratio can be prepared on PDMS, the preparation method can be completed only through preparation of microstructure patterns on the surface of the substrate, filling of sacrificial layer liquid and PDMS tiling and curing, the overall process is simple, operation is easy and convenient, and application and popularization are facilitated.

Description

technical field [0001] The invention relates to the technical field of microstructure preparation, in particular to a preparation method of a microstructure with constant aspect ratio. Meanwhile, the present invention also relates to a PDMS elastomer having the microstructure prepared by the above method. Background technique [0002] Microstructure is a structural form with a scale generally on the order of microns, which has a wide range of applications in microfluidics and biomedical microfluidics. At present, the methods used to prepare microstructures mainly include rigid plastic and metal injection mold processing technology, dry film photolithography processing technology, photolithography processing polydimethylsiloxane (PDMS) technology, and molding layered processing technology. , hot pressing forming process, and stretching capillary glass tube process, etching process of inorganic materials and other methods. [0003] Although the existing methods for preparing...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B81C1/00B81B7/00G03F7/00
CPCB81C1/00206B81C1/00444B81C1/00531B81B7/00G03F7/0035
Inventor 时权巫金波何仲温维佳张萌颖薛厂
Owner SHANGHAI UNIV