Wafer failure analysis method
A failure analysis and wafer technology, applied in electronic circuit testing, measuring devices, instruments, etc., can solve the problems of increasing time cost, difficulty in sample preparation, and affecting the efficiency of sample preparation.
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[0054] In order to make the purpose, technical solutions and advantages of the embodiments of the present application clearer, the specific technical solutions of the invention will be further described in detail below in conjunction with the drawings in the embodiments of the present application. The following examples are used to illustrate the present application, but not to limit the scope of the present application.
[0055]As indicated in this application and claims, the terms "a", "an", "an" and / or "the" do not refer to the singular and may include the plural unless the context clearly indicates an exception. Generally speaking, the terms "comprising" and "comprising" only suggest the inclusion of clearly identified steps and elements, and these steps and elements do not constitute an exclusive list, and the method or device may also contain other steps or elements.
[0056] Spatial terms such as "on...", "below...", "underneath", "below...", "on...", "above", etc., can...
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