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Sensitive film, MEMS microphone and manufacturing method thereof

A sensitive membrane and microphone technology, applied in the field of sensitive membranes, can solve problems such as large elastic deformation and rupture failure of sensitive membranes, and achieve the effects of improving impact resistance, reducing the probability of rupture failure, and improving structural strength

Active Publication Date: 2021-01-15
WEIFANG GOERTEK MICROELECTRONICS CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In order to improve the compliance of the sensitive membrane and release the stress of the sensitive membrane, generally the elastic deformation of some parts of the sensitive membrane will be larger. This setting makes the sensitive membrane relatively fragile. Membrane prone to rupture and failure

Method used

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  • Sensitive film, MEMS microphone and manufacturing method thereof
  • Sensitive film, MEMS microphone and manufacturing method thereof
  • Sensitive film, MEMS microphone and manufacturing method thereof

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Embodiment Construction

[0040]The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative work shall fall within the protection scope of the present invention.

[0041]It should be noted that all directional indicators (such as up, down, left, right, front, back...) in the embodiments of the present invention are only used to explain the relationship between components in a particular posture (as shown in the accompanying drawings). If the relative position relationship, movement situation, etc. change, the directional indication will change accordingly.

[0042]In addition, the descriptions related to "fi...

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Abstract

The invention discloses a sensitive film, an MEMS microphone and a manufacturing method thereof, and the sensitive film comprises: a sensing part which is used for sensing a vibration signal; a connecting part which is arranged around the sensing part and is used for fixing the sensing part; an action part which is connected with the sensing part and the connecting part, wherein the rigidity of the action part is smaller than that of the sensing part and / or that of the connecting part; and a reinforcing part, wherein the reinforcing part is arranged on the action part. According to the technical scheme, the structural strength of the sensitive film is improved, and the probability that the sensitive film is broken and fails is reduced.

Description

Technical field[0001]The invention relates to the technical field of sensitive membranes used for measurement, in particular to a sensitive membrane, a MEMS microphone and a manufacturing method thereof.Background technique[0002]MEMS (Micro Electro Mechanic System, Micro Electro Mechanic System) microphone is a kind of electric energy sound exchanger made by micro-machining technology, which has the characteristics of small size, good frequency response characteristics, and low noise. With the development of smaller and thinner electronic devices, MEMS microphones are more and more widely used in these devices.[0003]The MEMS microphone in the related art includes a silicon substrate and a flat capacitor composed of a sensitive membrane and a back plate, and the sensitive membrane is opposite to the back plate and separated by a certain distance. The sensitive film vibrates under the action of sound waves, which changes the distance between the sensitive film and the back plate, whic...

Claims

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Application Information

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IPC IPC(8): H04R7/02H04R7/16H04R19/02H04R19/00
CPCH04R7/02H04R7/16H04R19/02H04R19/005H04R2410/00H04R2209/00H04R2307/00
Inventor 夏贝贝王景雪
Owner WEIFANG GOERTEK MICROELECTRONICS CO LTD
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