Monocrystalline silicon wafer multi-mode efficient cleaning device

Abstract

The invention relates to the technical field of monocrystalline silicon wafers, and discloses a monocrystalline silicon wafer multi-mode efficient cleaning device which comprises a working frame. A bottom plate is fixedly installed at the bottom of the working frame, a water purifying box is fixedly installed at the top of the bottom plate, and a supporting frame is fixedly installed at the top ofthe working frame. A cleaning box located in the supporting frame is fixedly installed at the top of the working frame, a water purifying pump is fixedly installed on the left side of the water purifying box, and a water guiding pipe located on the front side of the cleaning box is fixedly installed at the top of the water purifying pump. According to the monocrystalline silicon wafer multi-modeefficient cleaning device, the water suction pipe is arranged on the purifying pump, purified water is guided into the water guiding pipe from the water suction pipe after the purifying pump is started, recycling is facilitated, and the monocrystalline silicon wafer multi-mode efficient cleaning device achieves zigzag efficient filtering on sewage through the snakelike filtering channel and the three-stage filtering net; the effect of rapid purification is conveniently achieved, so that the purified water can be recycled.

Description

technical field [0001] The invention relates to the technical field of single crystal silicon wafers, in particular to a multi-mode high-efficiency cleaning device for single crystal silicon wafers. Background technique [0002] Single crystal silicon wafer: a single crystal of silicon, a crystal with a basically complete lattice structure, different directions have different properties, and is a good semiconductor material. [0003] Existing monocrystalline silicon wafers have been widely used and can be used to manufacture semiconductor devices. For existing single crystal silicon wafers, cleaning is required during processing, but the existing cleaning devices are relatively simple and cannot efficiently clean Single crystal silicon wafers are cleaned quickly, and the sewage after the existing cleaning device cannot be recycled, which leads to waste of water resources and is difficult to meet the needs of the society. Therefore, a multi-mode efficient cleaning device for ...

AI Technical Summary

Problems solved by technology

[0005] Aiming at the deficiencies of the prior art, the present invention provides a multi-mode high-efficiency cleaning device for single crystal silicon wafers, which has the advantages of high-efficiency cleaning and convenient water circulation, and solves the problem that the existing cleaning devices are relatively simple and cannot efficiently clean single crystal silicon wafers. Fast cleaning, and the sewage after the existing cleaning device cannot be recycled, which leads to the waste of water resources

Images