Structure and manufacturing method of micro electrochemical sensor based on micro three-dimensional electrode

Abstract

The invention discloses a structure and a manufacturing method of a micro electrochemical sensor based on a micro three-dimensional electrode. The structure comprises a flexible circuit board and an electrode group, the flexible circuit board is curled into a column shape to form a sensor shell, the electrode group is arranged on the flexible circuit board, the top end of the sensor shell and thebottom end of the sensor shell are each provided with a sealing piece, a bonding pad is arranged on the sensor shell, and an electrolyte is filled in the sensor shell. According to the invention, theproblems that the area of a reference electrode is relatively small due to limited volume and area of the micro sensor, further the stability of the reference potential is not high, drift occurs, theservice life is limited and the present electrochemical sensor processing technology is complex and high in cost and the like are solved.

Description

technical field [0001] The invention relates to the field of sensors, in particular to a structure of a micro electrochemical sensor based on a micro three-dimensional electrode, and also to a manufacturing method of the micro electrochemical sensor based on a micro three-dimensional electrode. Background technique [0002] Electrochemical sensor is a sensor based on the electrochemical properties of the analyte and converts the chemical quantity of the analyte into an electrical quantity for sensing and detection. When in use, it measures electrical signals such as potential and current generated in the target electrochemical reaction. To characterize the electrochemical properties of the analyte. [0003] Among the many sensor types, electrochemical sensors have the advantages of relatively small size, low power consumption, simple structure, and low cost. They have gradually become the focus of research and have a wide range of applications. However, it also has problems...

AI Technical Summary

Problems solved by technology

[0015] First, due to the limited volume and area of ​​the miniaturized sensor, the area of ​​the reference electrode is small, so the stability of the reference potential is not high, there is potential drift, and the service life is limited.

[0016] Second, due to the limited volume and simple structure of the micro-electrochemical sensor, there is no relatively stable chloride ion concentration environment, and the reference electrode will produce potential fluctuations with changes in the surrounding chloride ion concentration, which will affect the measurement accuracy, so the stability is not high

[0017] Third, the area of ​​some working electrodes is encapsulated in a glass cylinder by metal wires, only exposing the cross-section at the bottom, so the effective area of ​​the working electrodes is small and the sensitivity is low

[0018] Fourth, the volume is larger

Sensors based on traditional glass electrodes, gas-permeable membranes, reference electrodes and their electrolytes are about the size of a pen, making it difficult to further miniaturize

[0019] Fifth, the traditional glass or silicon-based structure has insufficient toughness and is fragile and easy to break; some miniaturized flat-plate electrochemical sensors usually have small electrode sizes, limited sensor response and limited internal solution capacity, and low stability

The working electrode of some sensors is far away from the oxygen-permeable membrane, so the response speed is slow

[0020] Sixth, the processing technology is relatively complicated and the cost is high

For example, electrodes based on optical etching require expensive precision instruments and ultra-clean room environments, complex processing techniques, expensive production, and material costs.

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