A microscope objective

A microscope objective lens and lens technology, applied in the field of microscope objective lens, can solve the problems of low resolution performance, large number of lenses, and difficult processing, etc., achieve high resolution performance, ensure optical performance, and reduce processing difficulty.

Active Publication Date: 2022-07-05
MOTIC CHINA GRP CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] In view of the above situation, in order to overcome the defects of the prior art, the present invention provides a microscope objective lens, which can ensure the characteristics of large magnification, long working distance, large numerical aperture, high resolution performance, less lens number and simple processing, To solve the problems of large magnification, long working distance, small numerical aperture, low resolution performance, large number of lenses and difficult processing

Method used

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  • A microscope objective
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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0073] like figure 1 As shown, the microscope objective lens OB01 of the first embodiment includes a first lens group 81, a second lens group 82 and a third lens group 83, wherein the first lens group 81 includes a first lens 711 with positive refractive power and a positive refractive power of the second lens 712. The surface of the first lens 711 facing the object side is the first surface 7111 , and the surface facing the image side is the second surface 7112 . The surface of the second lens 712 facing the object side is the first surface 7121 , and the surface facing the image side is the second surface 7122 . The second lens group 82 includes a third lens 721 , a fourth lens 722 , a fifth lens 723 , a sixth lens 724 , a seventh lens 725 , an eighth lens 726 , and a ninth lens 727 arranged in this order from the object side to the image side , the tenth lens 728 . The third lens 721 has positive refractive power, the surface facing the object side is the first surface 7...

Embodiment 2

[0086] like Image 6 As shown, the structure of the microscope objective lens OB02 in the second embodiment is similar to that in the first embodiment, and also includes a first lens group 81 , a second lens group 82 , a third lens group 83 , a first lens 711 , and a second lens 712 , the third lens 721, the fourth lens 722, the fifth lens 723, the sixth lens 724, the seventh lens 725, the eighth lens 726, the ninth lens 727, the tenth lens 728, the eleventh lens 731, the twelfth lens The lens 732 , the thirteenth lens 733 , and the fourteenth lens 734 are different in that the material of the first lens 711 is selected, and the optical parameters of each lens are slightly different from those in the first embodiment.

[0087] Specifically, in the microscope objective lens of the second embodiment, the focal length f11 of the first lens 711 is 14.79, the refractive index N11 is 1.91, the Abbe number V11 is 36.2, and the thickness T11 is 2.89. The focal length f12 of the secon...

Embodiment 3

[0098] like Figure 11 As shown, the structure of the microscope objective lens in the third embodiment is similar to that of the first embodiment, and also includes a first lens group 81, a second lens group 82, a third lens group 83, a first lens 711, a second lens 712, The third lens 721, the fourth lens 722, the fifth lens 723, the sixth lens 724, the seventh lens 725, the eighth lens 726, the ninth lens 727, the tenth lens 728, the eleventh lens 731, the twelfth lens 732, the thirteenth lens 733, and the fourteenth lens 734, the difference is that the first lens 711 is made of a material with a relatively high refractive index, and the optical parameters of each lens are slightly different from those in the first embodiment.

[0099] Specifically, in the microscope objective lens of the third embodiment, the focal length f11 of the first lens 711 is 14.19, the refractive index N11 is 1.94, the Abbe number V11 is 31.7, and the thickness T11 is 2.89. The focal length f12 o...

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Abstract

The invention discloses a microscope objective lens, comprising a first lens group with positive refractive power, a second lens group with positive refractive power and a third lens group with negative refractive power. The second lens group with positive refractive power is arranged on the first lens group with positive refractive power Between the lens group and the third lens group with negative refractive power; the first lens group with positive refractive power includes a first lens with positive refractive power and a second lens with positive refractive power, and the second lens with positive refractive power is located in the second lens with positive refractive power. On one lens, the first lens with positive refractive power is provided in a meniscus shape with a concave surface facing the object side with positive refractive power. The invention belongs to the field of optical technology, in particular to a microscope objective lens, which can ensure the characteristics of large magnification, long working distance, large numerical aperture, high resolution performance, less number of lenses and simple processing, so as to solve the problem of large magnification, Under long working distance, small numerical aperture, low resolution performance, large number of lenses and difficult processing.

Description

technical field [0001] The invention belongs to the technical field of optics, and specifically refers to a microscope objective lens. Background technique [0002] With the rapid development of the semiconductor industry in recent years, the precision required for its surface roughness is getting higher and higher. By improving the detection accuracy of the microscope to meet the observation requirements. Generally speaking, due to the long working distance required for industrial detection, large magnification and large numerical aperture are required to observe more details on the microscope. For such microscope objectives, it is very difficult to correct the axial aberration and the chromatic aberration of magnification, and the optical resolution performance will be degraded due to the influence of the aberration. [0003] Patent document CN101999090A discloses a microscope objective lens: an objective lens with large magnification and long working distance, but small...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B21/02
CPCG02B21/02
Inventor 方政林顺华
Owner MOTIC CHINA GRP CO LTD
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