To-be-measured sample piece parameter measuring method based on ellipsometer
A technology of parameter measurement and ellipsometer, which is applied in the direction of measuring devices, instruments, scientific instruments, etc., to achieve the effect of reducing detection efficiency and improving repeatability accuracy
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[0038] The specific implementation manners of the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.
[0039] figure 1 A flow chart of a method for measuring the parameters of a sample to be tested based on an ellipsometer provided in an embodiment of the present invention, first combined with figure 1 The overall principle of the method provided by the embodiment of the present invention is briefly described, and its specific process can be summarized as the following steps:
[0040] Step 1. Based on the fact that the light intensity random noise of the ellipsometer measurement system satisfies the characteristics of Gaussian distribution, the t distribution model of the random noise of the ellipsometer measurement system is established by using the t distribution theory ...
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