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Vacuum four-axis motion platform structure for scanning electron microscope

A four-axis motion platform and electron microscope technology, which is applied in the field of scanning electron microscopes, can solve problems such as difficult assembly and debugging, short motion strokes, and difficult processing.

Pending Publication Date: 2021-02-12
无锡量子感知研究所
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] The structure of the original vacuum platform is complex, difficult to process and difficult to assemble and debug, and the external motor increases the dynamic seal, the repeated positioning accuracy is not very high, the movement stroke is short, and the platform has a high deflation rate

Method used

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  • Vacuum four-axis motion platform structure for scanning electron microscope
  • Vacuum four-axis motion platform structure for scanning electron microscope

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Embodiment Construction

[0019] In order to make the technical means, creative features, goals and effects achieved by the present invention easy to understand, the present invention will be further described below in conjunction with specific embodiments.

[0020] Such as Figure 1-2 As shown, a vacuum four-axis motion platform structure used in a scanning electron microscope includes a base platform 1, a coupling joint 2, a stepping motor 3 and a rotary table 4, and the top of the base platform 1 is fixed with a Z Axis vacuum motor 11, the Z-axis vacuum motor 11 is connected with a Z-axis screw 12 through the coupling joint 2, Z-axis guide rails 14 are fixed on both sides of the base platform 1, and Z-axis guide rails 14 are provided with Z A shaft slide 13, the Z-axis screw 12 is arranged in the Z-axis slide 13, and the Z-axis vacuum motor 11 can drive the Z-axis slide 13 to slide along the Z-axis guide rail 14 through the coupling joint 2 and the Z-axis screw 12 ; The Y-axis vacuum motor 21 is fi...

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Abstract

The invention discloses a vacuum four-axis motion platform structure for a scanning electron microscope. The vacuum four-axis motion platform structure for the scanning electron microscope not only can enable a sample support on a rotary table to move on an X axis, a Y axis and a Z axis, but also can enable the sample support to rotate by 360 degrees along with the rotary table, so that multi-dimensional rapid movement of a to-be-detected sample is realized, and the movement is more accurate and controllable due to the design of the travel switch. In conclusion, the vacuum four-axis motion platform for the scanning electron microscope is scientific and reasonable in structural design, capable of rapidly and reliably positioning a sample on the sample support, high in repeated positioning precision, compact in overall mechanism, long in linear travel distance of the sample on the X axis, the Y axis and the Z axis, capable of containing a large-size sample on the sample support and convenient to assemble and disassemble, is high in reliability and can be suitable for field emission electron microscopes and other high-vacuum environments.

Description

technical field [0001] The invention relates to the technical field of scanning electron microscopes, in particular to a vacuum four-axis motion platform structure used in scanning electron microscopes. Background technique [0002] With the development of science and technology, scanning electron microscopes are widely used in scientific research, enterprises and institutions. The scanning electron microscope uses the high voltage between the cathode and the anode to generate high-speed electrons. After several stages of focusing, it forms an extremely fine electron beam, scans and excites various signals on the surface of the sample point by point, and finally collects images through different sensors. In order to flexibly adjust different samples, adjust different sample areas, adjust resolution, adjust image depth of field and other parameters, it is necessary to perform multi-axis movement in a narrow vacuum chamber, so that the sample to be photographed can be reliably...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N23/2204G01N23/2251
CPCG01N23/2204G01N23/2251
Inventor 张凡凡戴晓鹏赫松龄贺羽张伟
Owner 无锡量子感知研究所
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