Position detection sensor and wafer box position detection device and method

Abstract

The invention provides a position detection sensor, a wafer box position detection device and a wafer box position detection method. The sensor comprises a triggering part and a transmitting part, thetriggering part comprises a first end part and a second end part which are connected, and the first end part can move up and down relative to the second end part; the device comprises a bearing table, a positioning pin, a controller and the position detection sensor. The method comprises the steps: installing a position detection sensor on a bearing table; adjusting the height of a trigger part of the position detection sensor according to the height of the wafer box to be detected; placing the wafer box to be detected on a bearing platform of the bearing platform; receiving a signal which issent by the position detection sensor and indicates whether the position of the wafer box is correct or not; and judging whether the position of the wafer box is correct or not according to the signal. The height of the position detection sensor can be adjusted, so that the position detection sensor can be suitable for different types of wafer boxes.

Description

technical field [0001] The invention relates to the technical field of semiconductor equipment, in particular to a position detection sensor, a wafer box position detection device and a method. Background technique [0002] Wafer (Wafer) refers to the silicon wafer used to make silicon semiconductor integrated circuits, and its raw material is silicon. High-purity polycrystalline silicon is dissolved and mixed with silicon crystal seeds, and then slowly pulled out to form cylindrical single crystal silicon. After the silicon ingot is ground, polished, and sliced, it forms a silicon wafer, that is, a wafer. At present, domestic wafer production lines are mainly 8-inch and 12-inch. [0003] In the semiconductor device manufacturing process, the wafer used for manufacturing the semiconductor device needs to go through several processes before being made into the desired semiconductor device. Wafers are generally stored in a wafer box (FOUP). When the wafer undergoes various ...

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Problems solved by technology

[0005] The purpose of the present invention is to provide a position detection sensor, a wafer cassette position detection device and method, to solve the problem that the height of the position detection sensor cannot be adjusted in the prior art, which causes some wafer cassettes to be placed on the carrier table. The problem of being induced

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