Synaptic thin film transistor based on lithium-doped transparent oxide and preparation method thereof

Abstract

The invention relates to a preparation method of a synaptic thin film transistor based on lithium-doped transparent oxide, which comprises the following steps: S1, providing a substrate, and carryingout cleaning and hydrophilic treatment on the substrate; S2, preparing a lithium-doped transparent oxide insulating layer on one surface of the substrate by using an aqueous solution method; S3, performing hydrophilic treatment on the lithium-doped transparent oxide insulating layer; S4, preparing an oxide semiconductor layer on the lithium-doped transparent oxide insulating layer by using an aqueous solution method; S5, preparing a source electrode and a drain electrode on the oxide semiconductor layer by using a thermal evaporation process; and S6, preparing a gate electrode on one side, faraway from the lithium-doped transparent oxide insulating layer, of the substrate by utilizing a thermal evaporation process. The preparation method is environment-friendly and low-temperature, large-area preparation can be realized, the preparation process is simple and efficient due to relatively low temperature in preparation, the preparation time can be greatly shortened, the preparation costis relatively low, and the insulating layer has vacancy defects; and lithium ions are doped in the insulating layer, so that the device has good synaptic device characteristics.

Description

technical field [0001] The invention relates to a lithium-doped transparent oxide-based synaptic thin film transistor and a preparation method thereof, belonging to the technical field of microelectronics. Background technique [0002] With the rise of the Internet of Things, big data, and artificial intelligence, people's demand for low-energy, high-adaptability computing is increasing, and traditional von Neumann computing has been difficult to meet the needs of human society. Neuromorphic computing has a completely different information processing method from traditional von Neumann computing, and greatly improves the thinking ability and response ability of computers by imitating the structure of the human brain. In the brain, neurons realize functions such as learning and memory by modifying the synaptic weights between biological synapses, which indicates that for the realization of neuromorphic computing, the development of artificial synapses (ie, synaptic thin film ...

AI Technical Summary

Problems solved by technology

However, the existing methods of preparing synaptic thin film transistors are generally prepared by photolithography and vacuum coating, which require the use of expensive large-scale equipment, long preparation time and high production costs

And the current synaptic thin film transistor is not conducive to the application of flexible electronic devices and other applications

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