Probe card
A technology of probe cards and components, applied in the field of probe cards, can solve time-consuming problems, achieve the effect of improving detection efficiency and solving time-consuming problems
Pending Publication Date: 2021-02-26
HERMES TESTING SOLUTIONS
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Problems solved by technology
[0004] In order to solve the above-mentioned problem of time-consuming detection, the present invention provides a probe card, comprising: an electrical detection substrate with a through hole, the light output element is arranged in the through hole, and the light output element is connected to the light source control unit by an optical fiber , to provide output light, and the positioning element can make the light output element move in three-dimensional space or adjust the included angle with the central axis of the light output element
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[0025] Various embodiments of the present invention will be described in detail below and illustrated with accompanying drawings. In addition to the multiple detailed descriptions, the present invention can also be widely implemented in other embodiments, and any easy replacement, modification, and equivalent changes of any of the described embodiments are included in the scope of the present invention, and are subject to patent application. range prevails. In the description of the specification, many specific details are provided in order to enable readers to have a more complete understanding of the present invention; however, the present invention may still be practiced under the premise of omitting some or all of the specific details. Furthermore, well-known steps or elements have not been described in detail in order to avoid unnecessarily limiting the invention. The same or similar elements in the drawings will be denoted by the same or similar symbols. It should be n...
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The invention provides a probe card, which is used for detecting a wafer to be detected and comprises a light output element which can be connected to a positioning element, wherein the light output element is arranged in a through hole of an electrical detection substrate with the through hole, the light output element is connected with a light source control unit through an optical fiber, outputlight can be transmitted to the light output element from the light source control unit, and the positioning element can enable the light output element to move in a three-dimensional space or adjustthe included angle between the light output element and the central axis of the light output element, so that light detection and electric detection can be carried out at the same time when the silicon optical wafer is tested.
Description
【Technical field】 [0001] The invention relates to a probe card, in particular to a probe card with electrical detection and light detection. 【Background technique】 [0002] In the mass production test of known silicon photonics wafers, a mechanical arm equipped with light output elements and Z-axis displacement sensing elements is used to perform light detection on the wafer to be tested, wherein the light output elements are connected to the light source control unit by optical fibers, The output light provided by the light source control unit is transmitted to the light output element through the optical fiber, and then the output light is output by the light output element, so that the optimal detection position reaches the correct light flux. [0003] In addition, the position of the probe is adjusted by the probe positioning element for electrical detection, and the aforementioned optical detection is two independent mechanisms, which means that at the same detection po...
Claims
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Login to View More IPC IPC(8): G01R1/073G01N21/01
CPCG01R1/073G01N21/01
Inventor 徐文元周士莹张思颖
Owner HERMES TESTING SOLUTIONS