Projection Distortion Correction Method, System and Medium in Optical Surface Compensation Interferometry
An interferometric measurement and distortion correction technology, applied in the field of projection distortion correction, can solve problems such as poor results and distortion correction errors, and achieve the effects of high precision, high efficiency and simple calculation method
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[0039] The projection distortion correction method, system and medium in the optical surface shape compensation interferometry of the present invention will be further described in detail below with an example of CGH compensation interferometry of an aspheric surface. The surface to be tested is an ellipsoid with a vertex curvature radius of 691.1 mm and a quadratic constant k=-0.9911. The aperture is φ470 mm, and the diameter of the central blocking hole is 100 mm.
[0040] Such as figure 1 As shown, a spherical wave interferometer 32 is used to configure a spherical lens 34 and a compensator 23 (CGH compensator) to perform compensation interferometry of the ellipsoidal mirror shape, and the measurement result is the surface corresponding to the pixel coordinates on the image plane 31 of the interferometer shape error distribution. The pixel coordinates are in a linear mapping relationship with the last surface on the spherical lens 34 , that is, the abscissa on the spherica...
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