A method for optimizing the magnetic properties of cobalt-based thin-film inductor materials using active metal oxides

An active metal and oxide technology, applied in the application of magnetic films to substrates, inductance/transformer/magnet manufacturing, circuits, etc., can solve problems such as limiting the coercivity control ability of CoZrTa films, and achieve increased range and controllability. The effect of sex, liveliness, and simple process
CN112509806BActive Publication Date: 2021-12-24广东麦格智芯精密仪器有限公司
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
广东麦格智芯精密仪器有限公司
Publication Date
2021-12-24

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Abstract

The invention discloses a method for optimizing the magnetic properties of a cobalt-based thin-film inductance material by using an active metal oxide, and belongs to the technical field of information storage and inductance. The present invention selects the ionic oxide composed of more active metals as the barrier layer, and uses orbital hybridization engineering to realize the control of the soft magnetic properties of the film, obtains a beneficial and moderate Co-O orbital hybridization state, and then optimizes the ferromagnetism Magnetic properties of thin film materials. Ionic oxides have low chemical bond energy and strong activity. Compared with Al metal, the more active metal Hf or Mg is easier to capture O from Co, which makes the interface oxidation state show different degrees of hypoxia, aerobic, and hyperoxic. Oxygen increases the adjustment range and controllability, so that the orbital hybridization state of Co-O can be moderately changed, thereby causing changes in the magnetic properties of Co-based soft magnetic materials / MO, with simple process, convenient control and high efficiency , low cost and other advantages, suitable for application in future information storage and inductive technology.
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Description

technical field

[0001] The invention belongs to the technical field of information storage and inductance, and specifically relates to a method for regulating the Co-based soft magnetic / non-magnetic interface structure by selecting ionic active metal oxides, thereby optimizing the magnetic performance of the soft magnetic film. Background technique

[0002] In recent years, with the rapid development of electronic information technology, the arrival of the 5G era not only provides great convenience for people's production and life, such as the application of smart home, unmanned driving, wearable devices, etc., but also makes the receiving equipment of information terminals welcome With the huge innovation coming, higher requirements are put forward for the performance, reliability, miniaturization and energy saving of advanced electronic components such as magnetic sensors, inductors and transformers. Therefore, it is necessary to continuously improve the soft magnetic prop...

Claims

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