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Digital holographic three-dimensional topography measurement device and method

A three-dimensional topography and digital holography technology, applied in measurement devices, optical devices, instruments, etc., can solve problems such as the inability to achieve fast real-time topography measurement, achieve fast real-time topography measurement, reduce measurement time, avoid The effect of the phase unwrapping process

Active Publication Date: 2021-03-19
KUNMING UNIV OF SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] Most of the existing shape measurement methods use single-sensor acquisition, which needs to record holograms in different states in sequence, which requires a high stability of the measurement environment, and cannot achieve fast and real-time shape measurement

Method used

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  • Digital holographic three-dimensional topography measurement device and method

Examples

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Embodiment 1

[0074] An embodiment of the present invention provides a digital holographic three-dimensional shape measurement device. The digital holographic three-dimensional shape measurement device in this embodiment includes: a laser, a light splitting component, an object light path for irradiating an object to be measured, and a reference light for reference Optical path, optical path synthesis component, acquisition system including multiple sensors;

[0075] The light splitting component divides the light emitted by the laser into two beams, the first beam of light irradiates the object to be measured through the object light path, and the object to be measured reflects the first beam of light irradiated; the second beam of light is used as a reference light It is transmitted by the reference light optical path, and the reference light transmitted by the reference light optical path and the reflected light of the object to be measured are combined in the optical path synthesis compo...

Embodiment 2

[0087] An embodiment of the present invention also provides a measurement method based on the above-mentioned digital holographic three-dimensional shape measurement device, the method may include the following steps:

[0088] S1. Adjust the detection surface of the sensor in the acquisition system, and record the angle information of the adjusted detection surface of each sensor relative to the central sensor.

[0089] In this embodiment, the angle information of the detection surface of each sensor can be adjusted through the aforementioned electronically controlled rotating platform and translation platform.

[0090] The angular information may be angular information relative to the central sensor axis.

[0091] S2. Start the laser, and acquire holographic information of the reference light and the reflected light that interfere.

[0092] Calibration is performed by computing equipment such as a computer to control the movement and rotation of the translation platform and ...

Embodiment 3

[0144] An embodiment of the present invention also provides a method for processing a hologram, which may include the following steps:

[0145] A1. The computing device acquires the holographic information of the reference light and the reflected light that interfere.

[0146] In this embodiment, the holographic information includes phase information detected by multiple sensors, and the multiple sensors have a certain rotation angle with respect to the central sensor among them, and furthermore, there is an oblique phase factor in the phase information.

[0147] A2. Reconstruct the holographic information to obtain a three-dimensional shape of the object to be measured.

[0148] Specifically, it may include:

[0149] A21. Reconstruct the holographic information based on the conjugate light of the reference light collected in the collection system, and obtain the object light field information in the form of complex amplitude for extracting phase information,

[0150] A22. B...

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Abstract

The invention relates to a digital holographic three-dimensional topography measurement device and method. The device comprises a laser device, a light splitting assembly, an object light path used for irradiating a to-be-measured object, a reference light path used for reference, a light path synthesis assembly and an acquisition system comprising a plurality of sensors, wherein the light splitting assembly splits light emitted by the laser device into two beams, the first beam of light irradiates the to-be-measured object through the object light path, the to-be-measured object reflects theirradiated first beam of light, the second beam of light serves as reference light and is transmitted by the reference light path, the reference light transmitted by the reference light path and reflected light of the to-be-measured object converge in the light path synthesis assembly and are emitted into the detection surfaces of the sensors, the holographic information of the reference light andthe reflected light which interfere with each other in the light path synthesis assembly is recorded by the detection surfaces of the sensors in the acquisition system, and the three-dimensional morphology of the to-be-measured object is acquired according to the holographic information. According to the structure, the surface topography of the three-dimensional object can be measured in a high-precision, rapid and real-time manner.

Description

technical field [0001] The invention relates to holographic imaging measurement technology, in particular to a digital holographic three-dimensional shape measurement device and method. Background technique [0002] The rapid development of precision machining has stimulated the need for precise measurement of the geometric features of objects, and the non-destructive and non-contact shape measurement of three-dimensional objects is very important for its design, testing and characterization. Due to the characteristics of fast real-time, full field of view, non-contact, non-destructive, high-resolution imaging, and convenient and flexible storage, reproduction and transmission of holograms, digital holography is an important research trend in recent years for optical detection. It is widely used in the measurement of 3D shape and 3D deformation. In digital holography, the intensity and phase of the object light field can be easily obtained by computer numerical simulation o...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/24
CPCG01B11/2441
Inventor 夏海廷王世荣宋庆和郭荣鑫张长兴
Owner KUNMING UNIV OF SCI & TECH
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