Micro electro mechanical system, vertical cavity surface emitting laser and preparation method thereof
A vertical cavity surface emission, MEMS technology, used in lasers, laser parts, semiconductor lasers, etc., can solve the problems of stress concentration, uneven force on the cantilever beam, affecting the wavelength tuning range, etc., to achieve uniform stress distribution, reduce Maximum stress, effect of increasing wavelength tuning range
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[0023] Hereinafter, embodiments of the present disclosure will be described with reference to the drawings. It should be understood, however, that these descriptions are exemplary only, and are not intended to limit the scope of the present disclosure. In the following detailed description, for purposes of explanation, numerous specific details are set forth in order to provide a thorough understanding of the embodiments of the present disclosure. It may be evident, however, that one or more embodiments may be practiced without these specific details. Also, in the following description, descriptions of well-known structures and techniques are omitted to avoid unnecessarily obscuring the concepts of the present disclosure.
[0024] It will be understood that when an element such as a layer, film, region, or substrate is referred to as being "on" another element, it can be directly on the other element or intervening elements may also be present. Also, in the specification and...
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