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Molten droplet generating device for EUV light source

A technology for generating device and molten liquid, which is applied in the direction of exposure device, optics, opto-mechanical equipment, etc.

Pending Publication Date: 2021-03-23
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI +1
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  • Claims
  • Application Information

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Problems solved by technology

[0002] At present, foreign countries are in a state of blockade for extreme ultraviolet lithography machine technology. There are many technical directions in the field of lithography machines that are restricted in China. During the research process of EUV light source for many years in China, the formation quality of metal droplets determines the EUV light source. The quality of metal droplets, but the current metal droplet generation device is limited by the technical prototype, and cannot maintain the formation quality of metal droplets stably for a long time

Method used

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  • Molten droplet generating device for EUV light source
  • Molten droplet generating device for EUV light source
  • Molten droplet generating device for EUV light source

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Embodiment Construction

[0020] The present invention will be further described below in conjunction with the accompanying drawings.

[0021] A molten droplet generating device for EUV light sources, including a compression nut 3, a high-speed nozzle 4, a body 1 and an inner cavity 2, the body 1 includes a heat transfer oil input port, a heat transfer oil output port 101, an inner cavity 102. Heating chamber 103 and electric heating rod 104, the lower part of the outer wall of the body 1 is provided with a heat transfer oil input port, and the upper part of the side of the body 1 opposite to the heat transfer oil input port is provided with a heat transfer oil output port 101; the body 1 An interlayer is provided, and the interlayer is a heating chamber 103, the heating chamber 103 is filled with heat conducting oil, one end of the electric heating rod 104 extends into the heat conducting oil of the heating chamber 103, and the other end of the electric heating rod 104 It is fixed on the top of the bo...

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Abstract

The invention provides a molten liquid drop generating device for an EUV light source, which is characterized in that a heat conduction oil input port and a heat conduction oil output port are formedin the outer wall of a body; a heating cavity is filled with heat conduction oil, and an electric heating rod extends into the heat conduction oil; an inner cavity is installed in the inner cavity, the top of the inner cavity of the top cover is connected, a fixing cap is installed in the inner cavity, a compression spring is fixed to the bottom of the fixing cap, the bottom of the compression spring is a filter cap, the bottom of the filter cap is communicated with an output channel, the output channel is connected with a high-speed spray nozzle, and the high-speed spray nozzle is connected with a compression nut fixed to the bottom of the body. The device has the advantages that the filtering cap is used for removing metal impurities; the sealing ring and the compression spring are usedfor maintaining the melting device to be used in a high-temperature and high-pressure environment, and the inner cavity realizes heating, melting and conveying of metal; the heating cavity is used fortransmitting a heat-conducting medium; the electric heating rod maintains the whole experiment temperature environment of the melting device; and the high-speed spray nozzle sprays experimental metalliquid drops according to requirements.

Description

technical field [0001] The invention relates to the technical field of extreme ultraviolet lithography machines, in particular to a melting droplet generating device for EUV light sources. Background technique [0002] At present, foreign countries are in a state of blockade for extreme ultraviolet lithography machine technology. There are many technical directions in the field of lithography machines that are restricted in China. During the research process of EUV light source for many years in China, the formation quality of metal droplets determines the EUV light source. The quality of metal droplets, but the current metal droplet generation device is limited by the technical prototype, and cannot maintain the formation quality of metal droplets stably for a long time. Contents of the invention [0003] The object of the present invention is to provide a melting droplet generating device for an EUV light source to solve the deficiencies of the prior art. [0004] The n...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G03F7/20H05G2/00H05B3/40
CPCG03F7/70033H05G2/00H05G2/003H05B3/40
Inventor 孙海轶王成王关德李学红邹家杰刘科冷雨欣翟腾飞
Owner SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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