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Efficient preheating device for probe card

A preheating device and probe card technology, which is applied in the field of probe card preheating, can solve the problems of low working efficiency of the probe card preheating device, achieve the effects of improving beneficial effects, expanding the scope of use, and saving time

Active Publication Date: 2021-03-30
旺矽科技(苏州)有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] The purpose of the present invention is to provide a high-efficiency preheating device for probe cards to solve the problem of low working efficiency of the probe card preheating device proposed in the above background technology, and apply modified polyurethane materials to the structure of the preheating device. In order to achieve the effect of rapid heating, uniform and stable temperature

Method used

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  • Efficient preheating device for probe card
  • Efficient preheating device for probe card
  • Efficient preheating device for probe card

Examples

Experimental program
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Effect test

Embodiment 1

[0053] see Figure 1-4 , an embodiment provided by the present invention: a high-efficiency preheating device for probe cards, including a base 1, a preheating device protection shell 2, a turntable mounting base 3 and a blower fan protection shell 4, and the top of the base 1 is fixedly installed with The preheating device protection shell 2, the base 1 and the preheating device protection shell 2 are fixedly installed through the support frame 101, and the bottom of the base 1 is provided with a rubber protection pad for use;

[0054] The inside of the protective casing 2 of the preheating device is provided with a heat insulating layer 201 and a thermal insulation layer 202 in sequence. Both sides of the protective casing 2 of the preheating device are fixedly installed with resistance heating wires 203, and one side of the resistance heating wires 203 is fixedly installed with a stopper. The plate 204 is used in cooperation with the blowing fan 401, the resistance heating ...

Embodiment 2

[0061] A high-efficiency preheating device for a probe card, the specific implementation method is the same as that of Example 1. The difference lies in that the material of the heat insulation layer (201) is modified polyurethane.

[0062] The raw materials of the modified polyurethane include: in parts by weight, 56 parts of polyester polyol, 18 parts of isocyanate, 7 parts of ethanolamine, 4 parts of oxysilane, 1 part of catalyst and 3 parts of foaming agent.

[0063] The hydroxyl value of the polyester polyol is 204 mg KOH / g, purchased from Shandong Moore Chemical Co., Ltd., the model is 2054.

[0064] The isocyanate is MDI and IPDI, and the weight ratio of MDI and IPDI is 2:3. The CAS number of MDI is 26447-40-5, and the CAS number of IPDI is 4098-71-9.

[0065] The ethanolamine is diethanolamine, triethanolamine and N-tert-butylethanolamine, and the weight ratio of the three is 1.4:1:0.5.

[0066] The raw material of the modified polyurethane also includes 30 parts of...

Embodiment 3

[0077] A high-efficiency preheating device for a probe card, the specific implementation method is the same as that in Example 2. The difference is that the material of the modified polyurethane does not include bisphenol A epoxy resin.

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Abstract

The invention discloses an efficient preheating device for a probe card, which comprises a base, a preheating device protection shell, a turntable mounting base and a blowing fan protection shell. A thermal insulation layer and a heat preservation layer are sequentially arranged in the preheating device protection shell, and resistance heating wires are fixedly mounted on both sides in the preheating device protection shell. A temperature sensor is fixedly mounted at the top of the interior of the preheating device protection shell, a rotary disc is rotatably mounted in the rotary disc mounting base through a rotary shaft rod, and a motor is fixedly mounted at the bottom of the preheating device protection shell through a motor shell. Blowing fans are fixedly mounted on the two sides of the preheating device protection shell through blowing fan protection shells correspondingly, and a control panel is fixedly mounted at the top of the front face of the preheating device protection shell. By means of the blowing fan, the resistance heating wires, the heat insulation layer and the heat preservation layer, the device can be rapidly heated for preheating, and the overall practicabilityof the device is improved.

Description

technical field [0001] The invention relates to the technical field of probe card preheating, in particular to a high-efficiency preheating device for probe cards. Background technique [0002] The probe card (Probe Card) is responsible for the electrical connection between the test system and the integrated circuit chip. When performing a functional test on the wafer, the probes on the probe card are in contact with the pads of the wafer, and the wafer output test signal or receive the signal output by the wafer, the probe card is very important for the development of the early test and the yield guarantee of the later mass production test. It is an important process in the wafer manufacturing process that has a considerable impact on the manufacturing cost. Now a High-efficiency preheating devices for probe cards, but the existing preheating devices for probe cards have many problems or defects: [0003] 1. The existing probe card preheating device cannot quickly heat up ...

Claims

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Application Information

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IPC IPC(8): G01R1/073
CPCG01R1/073
Inventor 柯鸣华
Owner 旺矽科技(苏州)有限公司
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