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Long-working-distance high-resolution microscopic imaging device for measuring sample in high-low temperature box

A technology of high and low temperature box and working distance, which can be used in measurement devices, microscopes, analysis materials, etc., and can solve problems such as low resolution

Active Publication Date: 2021-04-02
NANJING UNIV OF SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] The purpose of the present invention is to provide a long working distance and high resolution microscopic imaging device for sample measurement in a high and low temperature box, aiming at the technical problem of low resolution of the existing imaging device in industrial dynamic detection at a working distance of 400-500mm , the imaging device can still perform high-resolution imaging on the surface of the measured object in the industrial inspection of the working environment with a long object distance

Method used

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  • Long-working-distance high-resolution microscopic imaging device for measuring sample in high-low temperature box
  • Long-working-distance high-resolution microscopic imaging device for measuring sample in high-low temperature box
  • Long-working-distance high-resolution microscopic imaging device for measuring sample in high-low temperature box

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Embodiment

[0029] Imaging optical path structure design part:

[0030] The initial structure selected for this imaging optical path is a double Gaussian structure. After setting a reasonable operand design and optimization in the ZEMAX software according to the imaging requirements, the following can be obtained: figure 1 The optical path diagram includes 8 lenses and 16 mirrors arranged in sequence from right to left, and the working distance is 420mm. The specific structural data of the lens group of this optical structure is shown in the following table:

[0031]

[0032]

[0033] Depend on figure 2 It can be seen that the radius of the diffuse spots of the spot diagram at the maximum field of view is 4.313 μm, and the diffuse spots are within the Airy disk, which is smaller than the pixel size of the industrial camera MER-200-20GM-P 4.4 μm, which can be matched.

[0034] Depend on image 3 It can be seen that the optical transfer function of this example is close to the diff...

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Abstract

The invention discloses a long-working-distance high-resolution microscopic imaging device for measuring a sample in a high-low temperature box, which consists of an imaging light path and an industrial digital camera, light path design and optimization are carried out through ZEMAX software, and finally an imaging light path with the working distance of 420mm, the view field range diameter of 8mm, the resolution of 10[mu]m and various imaging indexes close to diffraction limit is obtained. The imaging device is matched with a proper industrial digital camera to form the imaging device with long working distance and high resolution. The device can be used for imaging and measuring a sample in a high-low temperature box, and can also be used for occasions where an imaging light path is faraway from the sample and high-resolution imaging needs to be carried out in the field of industrial detection.

Description

technical field [0001] The invention belongs to the technical field of industrial testing equipment, and in particular relates to a long working distance and high resolution microscopic imaging device for measuring samples in a high and low temperature box. Background technique [0002] In order to detect changes in the measured object in a relatively harsh or special environment, such as measuring the expansion and contraction of materials in high and low temperature environments. At this time, the workpiece to be tested is located inside the high and low temperature box. Due to the internal structure restrictions and special temperature changes of the high and low temperature box, the imaging device cannot be placed in the high and low temperature box, and the workpiece to be tested can only be detected outside the high and low temperature box. In this case, the imaging device needs a relatively long working distance and ensures high-resolution imaging of the surface of th...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B21/36G02B21/02G01N21/84G01N25/00
CPCG02B21/361G02B21/02G01N21/84G01N25/00G01N2021/8411
Inventor 李莎莎宋旸施雨清蔡华俊
Owner NANJING UNIV OF SCI & TECH
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