In a method for improving the imaging properties of a projection objective of a microlithographic projection
exposure apparatus, an appropriate
illumination angle distribution adapted to a
mask (24; 224) to be projected is selected. Then locations (40a, 40b; 60a, 60b; 80a, 80b, 80c) in an
exit pupil of the projection objective (20), which are illuminated under these conditions by projection light during a projection of the
mask, are determined. For at least one image point, an actual value of an imaging quantity, e.g. a
wavefront profile or a polarization state, is determined that influences the imaging properties of the projection objective. Finally, corrective measures are calculated such that the actual value of the imaging quantity approximates a desired value at these locations. In this last step, however, deviations of the actual value from the desired value are taken into account exclusively at said locations illuminated in the
exit pupil.