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Pellicle frame body for flat panel display, and method for manufacturing same

The technology of a flat panel display and its manufacturing method is applied in the directions of instruments, photographic plate-making process of pattern surface, and original parts for photomechanical processing, etc., which can solve problems such as difficulties, achieve high Young's modulus, reduce material cost, and high The effect of corrosion resistance

Active Publication Date: 2021-04-02
NIPPON LIGHT METAL CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In addition to high dimensional accuracy and flatness, the pellicle frame is required to have strength that does not deform due to the tension of the pellicle, but it becomes difficult to meet these requirements as the pellicle frame becomes larger

Method used

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  • Pellicle frame body for flat panel display, and method for manufacturing same
  • Pellicle frame body for flat panel display, and method for manufacturing same
  • Pellicle frame body for flat panel display, and method for manufacturing same

Examples

Experimental program
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Effect test

Embodiment

[0096] Example

[0097] Cutting was performed on a JIS-SUS303 plate material to obtain a stainless steel frame with a long side of 940 mm, a short side of 760 mm, a frame width of 6 mm, and a frame thickness of 6 mm.

[0098] Next, after degreasing and washing the stainless steel frame, it was immersed in a mixed color solution (mixed solution of chromic acid and sulfuric acid) manufactured by Toyo RIKEN Co., Ltd. for 75 seconds to form a transparent oxide film. After that, it is washed with water and dried to obtain a pellicle frame for FPD. The film thickness of the transparent oxide film of the pellicle frame for FPD of the example was 490 nm. In this example, a scanning electron microscope (SEM) (manufactured by Hitachi, Ltd., model: S-4500) was used to observe the cross section of a sample obtained by cutting the pellicle frame for FPD, and calculate the upper surface and the inner surface from the observation photograph. The thickness of the coating on the side surface...

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Abstract

The present invention provides: an FPD pellicle frame body in which external color is controlled so as to make it easy to prevent scattering of exposure light, to inspect for adhesion of foreign objects before use, etc.; and an efficient method for manufacturing the FPD pellicle frame body. This FPD pellicle frame body is constituted from a stainless-steel material having a transparent oxide coating, the film thickness of the transparent oxide coating being 420-700 nm. The brightness index L* due to the interference color of reflected light from the surface of the transparent oxide coating andthe surface of the stainless steel material is preferably 33 or less.

Description

technical field [0001] The present invention relates to a frame of a pellicle for preventing foreign matter from adhering to a photomask and a photomask used in a photolithography process in the manufacture of a flat panel display (FPD) panel, and in particular to a frame for a large FPD Membrane frame and manufacturing method thereof. Background technique [0002] Semiconductor devices such as LSI and super LSI, and FPD panels are patterned by irradiating light on a semiconductor wafer or an original plate for FPD (patterning by photolithography). However, when using an exposure original plate with dust attached thereto, the dust absorbs and / or reverses light, so that the pattern cannot be transferred satisfactorily (for example, deformation of the pattern and blurring of edges occur). As a result, the quality and appearance of the semiconductor device or the FPD panel are impaired, and performance and manufacturing yield are reduced. [0003] Therefore, the process invol...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G03F1/64
CPCG03F1/64
Inventor 古村直人中野耕一饭塚章
Owner NIPPON LIGHT METAL CO LTD