Auxiliary machine for czochralski silicon single crystal furnace thermal field disassembling and cleaning

Abstract

The invention provides an auxiliary machine for czochralski silicon single crystal furnace thermal field disassembling and cleaning. The auxiliary machine comprises a supporting frame, a first driving assembly, supporting stand columns, clamping assemblies and tray assemblies, wherein the plurality of supporting stand columns are fixedly installed on the supporting frame, under driving force of the first driving assembly, the telescopic supporting stand columns do lifting motion in the vertical direction, the clamping assemblies are rotationally fixed to the supporting stand columns, the plurality of tray assemblies are rotationally installed on the supporting stand columns, and the clamping assemblies clamp a device in a single crystal furnace and places the device on the tray assemblies. The auxiliary machine is used for disassembling the single crystal furnace in a high-temperature state, so that time required for cooling is saved, and the problem of scalding the personnel is avoided; and in the process of disassembling the single crystal furnace, the rotatable clamping assemblies and the tray assemblies are small in occupied area, the pollution degree to the surrounding environment is reduced, the cleanliness of a workshop is guaranteed, the disassembling efficiency of the single crystal furnace is improved, and potential safety hazards of the workshop are reduced.

Description

technical field

[0001] The invention relates to the field of dismantling the thermal field of a single crystal furnace, in particular to an auxiliary machine for dismantling the thermal field of a Czochralski silicon single crystal furnace. Background technique

[0002] At present, the last step in the production process of the Czochralski single crystal furnace is to dismantle the furnace. The dismantling of the furnace is generally done after the cold cutting in the furnace, and the layers are peeled off by manual dismantling. The workshop is cleaned up, and the heavier components are transported manually with mechanical assistance, which is inefficient in disassembly. Contents of the invention

[0003] In view of this, the present invention provides an auxiliary machine for dismantling the thermal field of a Czochralski silicon single crystal furnace. The auxiliary machine uses a clamping assembly to take out the device in the single crystal furnace at a high temperatur...

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