Auxiliary machine for czochralski silicon single crystal furnace thermal field disassembling and cleaning

A technology of single crystal furnace and Czochralski silicon, which is applied in metal processing, metal processing equipment, manufacturing tools, etc., can solve the problems of low disassembly efficiency and achieve the effect of improving disassembly efficiency, reducing pollution degree and ensuring cleanliness

Active Publication Date: 2021-04-16
曲靖晶龙电子材料有限公司
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  • Application Information

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Problems solved by technology

[0002] At present, the last step in the production process of the Czochralski single crystal furnace is to dismantle the furnace. Generally, after the furnace is cold-cut, the dismantling of

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  • Auxiliary machine for czochralski silicon single crystal furnace thermal field disassembling and cleaning
  • Auxiliary machine for czochralski silicon single crystal furnace thermal field disassembling and cleaning
  • Auxiliary machine for czochralski silicon single crystal furnace thermal field disassembling and cleaning

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Embodiment Construction

[0038] The technical solution of the present invention will be specifically described below in conjunction with the accompanying drawings.

[0039] In the production process of the Czochralski single crystal furnace, the dismantling of the furnace is the last step of all processes. Generally, it takes a long time to cool down before dismantling the furnace. There are many tools needed in the process of dismantling the furnace, and the dismantling of the furnace requires The site is relatively large, so that the efficiency of the entire dismantling process is low, and the surrounding environmental pollution is relatively large. For this reason, the auxiliary machine for dismantling the thermal field of the Czochralski silicon single crystal furnace provided by the present invention is set for the devices that need to be disassembled in the single crystal furnace, so as to dismantle the single crystal furnace mechanically and improve the disassembly efficiency of the single cryst...

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Abstract

The invention provides an auxiliary machine for czochralski silicon single crystal furnace thermal field disassembling and cleaning. The auxiliary machine comprises a supporting frame, a first driving assembly, supporting stand columns, clamping assemblies and tray assemblies, wherein the plurality of supporting stand columns are fixedly installed on the supporting frame, under driving force of the first driving assembly, the telescopic supporting stand columns do lifting motion in the vertical direction, the clamping assemblies are rotationally fixed to the supporting stand columns, the plurality of tray assemblies are rotationally installed on the supporting stand columns, and the clamping assemblies clamp a device in a single crystal furnace and places the device on the tray assemblies. The auxiliary machine is used for disassembling the single crystal furnace in a high-temperature state, so that time required for cooling is saved, and the problem of scalding the personnel is avoided; and in the process of disassembling the single crystal furnace, the rotatable clamping assemblies and the tray assemblies are small in occupied area, the pollution degree to the surrounding environment is reduced, the cleanliness of a workshop is guaranteed, the disassembling efficiency of the single crystal furnace is improved, and potential safety hazards of the workshop are reduced.

Description

technical field [0001] The invention relates to the field of dismantling the thermal field of a single crystal furnace, in particular to an auxiliary machine for dismantling the thermal field of a Czochralski silicon single crystal furnace. Background technique [0002] At present, the last step in the production process of the Czochralski single crystal furnace is to dismantle the furnace. The dismantling of the furnace is generally done after the cold cutting in the furnace, and the layers are peeled off by manual dismantling. The workshop is cleaned up, and the heavier components are transported manually with mechanical assistance, which is inefficient in disassembly. Contents of the invention [0003] In view of this, the present invention provides an auxiliary machine for dismantling the thermal field of a Czochralski silicon single crystal furnace. The auxiliary machine uses a clamping assembly to take out the device in the single crystal furnace at a high temperatur...

Claims

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Application Information

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IPC IPC(8): B23P19/04
CPCY02P70/50
Inventor 宋克冉杨西虎孙须良
Owner 曲靖晶龙电子材料有限公司
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