Differential confocal fixed-surface interference pellet inner surface defect detection method and device

Abstract

The invention relates to a differential confocal fixed-plane interference pellet inner surface defect detection method and device, and belongs to the technical field of optical imaging and detection. According to the method, the zero crossing point of a differential confocal light intensity response curve is used for accurately positioning the axial positions of the inner surface (a detected surface) of a pellet and a camera (a detection surface), so that the accurate focusing imaging of the inner surface is realized; a short coherent light source and a spherical reference mirror are adopted in an interference light path to generate an inner surface zero interference pattern; and then inner surface defect distribution is directly obtained from the inner surface zero interferogram by using a phase-shifting interferometry. According to the invention, an objective and accurate adjustment judgment basis is provided for axial position adjustment of the pellet and the camera in interference measurement by utilizing the accurate positioning characteristic of the differential confocal technology for the first time, so that the direct and accurate detection of the inner surface defects of the pellet is realized for the first time. The invention provides a first feasible way for high-precision direct detection and large-batch high-efficiency automation of the defects of the inner surface of the pellet.

Description

technical field [0001] The invention belongs to the technical field of optical imaging and detection, and is used for precise detection of inner surface defects of target pellets, which is the most core key device in inertial confinement fusion (ICF). Background technique [0002] Inertial confinement fusion (ICF) is not only an ideal technology for human beings to obtain clean energy in the future, but also provides strong support for the development of cutting-edge scientific research in condensed matter physics and astrophysics under extreme high temperature and high pressure conditions. At present, China, the United States, France, Russia, Japan and other countries have vigorously carried out ICF-related research. The ICF precisely focuses multiple high-energy lasers on a tiny hollow spherical target filled with DT fuel, and the shell of the target implodes instantly and uniformly compresses the DT fuel inside to a high-temperature and high-pressure state, thereby achiev...

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Problems solved by technology

[0009] The purpose of the present invention is to solve the problem that the existing method is difficult to achieve accurate focusing on the inner surface of the target capsule and direct and precise detection of inner surface defects, and proposes to organically integrate the differential confocal positioning technology and the interference microscopy The technology realizes the accurate and fast automatic positioning of the target pellet and the camera in the optical path of the interference microscope, thereby effectively ensuring the focusing accuracy of the inner surface and the defect measurement accuracy, and providing a key technical basis and guarantee for rapid automatic detection

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