Differential confocal fixed surface interference target shot inner surface defect detection method and device

Abstract

The present invention involves different motivation of coordinating noodles to interfere in the surface defect detection method and device, which belongs to the field of optical imaging and detection technology.This method uses the excessive zero -point accurate positioning target pills in the inner surface of the target pills and the axial position of the camera (detection surface) to achieve the inner surface accurate focusing imaging of the inner surface of the target pills and the camera (detection surface).The light source and spherical reference mirror generate the internal surface zero interference diagram; then use the use of transplant interference technology to directly obtain the internal surface defect distribution from the inner surface zero interference diagram.For the first time, the present invention uses the accurate positioning characteristics of differential co -focus technology to provide an objective and accurate adjustment and judgment basis for the axial position installation of the target pill and the camera, and then the first time the surface defects in the target pills are directly and precise, the precision and precision of the surface defects in the target pill will be achieved for the first time.Test.The present invention provides the first feasible way to directly detect the high -precision of the surface defect in the target pill and high -efficiency automation.

Description

technical field [0001] The invention belongs to the technical field of optical imaging and detection, and is used for precise detection of inner surface defects of target pellets, which is the most core key device in inertial confinement fusion (ICF). Background technique [0002] Inertial confinement fusion (ICF) is not only an ideal technology for human beings to obtain clean energy in the future, but also provides strong support for the development of cutting-edge scientific research in condensed matter physics and astrophysics under extreme high temperature and high pressure conditions. At present, China, the United States, France, Russia, Japan and other countries have vigorously carried out ICF-related research. The ICF precisely focuses multiple high-energy lasers on a tiny hollow spherical target filled with DT fuel, and the shell of the target implodes instantly and uniformly compresses the DT fuel inside to a high-temperature and high-pressure state, thereby achiev...

AI Technical Summary

Problems solved by technology

[0009] The purpose of the present invention is to solve the problem that the existing method is difficult to achieve accurate focusing on the inner surface of the target capsule and direct and precise detection of inner surface defects, and proposes to organically integrate the differential confocal positioning technology and the interference microscopy The technology realizes the accurate and fast automatic positioning of the target pellet and the camera in the optical path of the interference microscope, thereby effectively ensuring the focusing accuracy of the inner surface and the defect measurement accuracy, and providing a key technical basis and guarantee for rapid automatic detection

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