Applied to electrical connectors, electrostatic chucks and semiconductor devices in vacuum chambers

Abstract

The invention discloses an electrical connector, an electrostatic chuck and a semiconductor device applied in a vacuum chamber, wherein the vacuum chamber is provided with opposite first and second terminal posts, and the electrical connector is arranged on the first terminal Between the column and the second terminal, the electrical connector includes: a first conductive part, which is arranged opposite to the first terminal, and can be in contact with or away from the first terminal; a second conductive part, which is in contact with the second terminal; A stretchable conductive structure located between the first conductive part and the second conductive part, the stretchable conductive structure, the first conductive part and the second conductive part form a sealed cavity; the stretchable conductive structure is used for compression in the atmospheric environment state, and the first conductive part is away from the first terminal; in a vacuum environment, the first conductive part can be stretched, and the first conductive part is in contact with the first terminal. In the electrical connector of the present invention, the electrical connector is in a compressed state and the circuit is disconnected in an atmospheric environment, and the electrical connector can be extended in a vacuum environment to realize circuit conduction.

Description

technical field [0001] The invention relates to the field of semiconductor equipment, and more particularly, relates to an electrical connector, an electrostatic chuck and a semiconductor equipment applied in a vacuum chamber. Background technique [0002] Plasma equipment is widely used in today's semiconductor, solar cell, flat panel display and other manufacturing processes. In the current plasma equipment, an electrostatic chuck (ESC for short) is usually used to replace the original mechanical chuck to clamp the wafer (wafer) during the process. Some electrostatic chucks are integral electrostatic chucks, and the other is split electrostatic chucks. [0003] The split electrostatic chuck is divided into two parts: the ceramic body of the electrostatic chuck and the metal base of the electrostatic chuck. The ceramic body of the electrostatic chuck is easy to disassemble and replace. Once part of it is damaged, it can be replaced with a new product. It does not need to b...

AI Technical Summary

Problems solved by technology

However, the space between the ceramic body of the electrostatic chuck and the metal base of the electrostatic chuck is completely closed, and it is impossible to reach into it for wiring. Usually, it is necessary to choose some quick-plug methods for electrical connection

However, the existing radio frequency joints that can realize quick plug-in electrical connection are usually hard contacts, which will place a hard limit on the ceramic disc of the electrostatic chuck and the metal base of the electrostatic chuck, resulting in the two being unable to move relative to each other.

There are usually material differences and temperature differences between the electrostatic chuck ceramic body and the electrostatic chuck metal base of the split-type high-temperature electrostatic chuck, and the radial expansion is not the same. structure

Otherwise, the deformation force caused by the expansion cannot be released and the ceramic disc will be broken

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