Novel vacuum system for mask manufacturing and feeding and discharging method

Abstract

The invention belongs to the field of mask manufacturing, and provides a novel vacuum system for mask manufacturing. The novel vacuum system comprises a process cavity, wherein a workpiece table and a mechanical arm are arranged in the process cavity, a feeding and discharging cavity is arranged at a feeding and discharging port on the outer side of the process cavity, the feeding and discharging cavity is communicated with the process cavity through the feeding and discharging port, the feeding and discharging port is provided with an electric control inner sealing door, and the feeding and discharging cavity is provided with a feeding port communicated with the outside and provided with an electric control outer sealing door. The process cavity and the feeding and discharging cavity are each provided with a vacuum adjusting device. The invention further provides a feeding and discharging method of the vacuum system. According to the novel vacuum system for mask manufacturing and the feeding and discharging method, the feeding and discharging cavity is arranged in front of the process cavity, switching of the feeding and discharging vacuum environment is completed in the process, the influence of interaction on the process is reduced, the manufacturing time is shortened on the whole, the efficiency and the productivity are improved, meanwhile, the pre-storage box is additionally arranged in the process cavity, the process waiting time is saved, and the efficiency and the productivity are further improved.

Description

technical field

[0001] The invention relates to a vacuum system and a loading and unloading method, in particular to a novel vacuum system and a loading and unloading method for mask manufacturing. Background technique

[0002] The manufacturing process of semiconductor integrated circuits has entered the mass production stage of 14-16 nanometers, so more advanced lithography technology is required to carve thinner line widths and more complex patterns. In the photolithography process, a template is needed to transfer and copy the pattern, and this template is called a photomask (also known as a photomask, hereinafter collectively referred to as a mask). The mask plate is a link connecting the design company and the crystal garden manufacturing. At present, maskless lithography cannot be realized in the lithography process of the wafer factory. Therefore, the mask plate is an extremely critical part in the manufacture of integrated circuits.

[0003] The main production pro...

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