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Substrate treatment device

A substrate processing device and technology for substrates, which are applied in the fields of vacuum evaporation plating, coating, electro-solid devices, etc., can solve the problems of increased total processing time, increased time, decreased display productivity, etc., so as to minimize installation errors and reduce the number of , the effect of precise alignment

Pending Publication Date: 2021-05-07
APPLIED MATERIALS INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

As a result, the time required to align the substrate and mask may increase, and thus the total processing time may also increase, which may lead to lower productivity in manufacturing displays

Method used

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Embodiment Construction

[0039] Preferred embodiments of the present invention will be described in detail below with reference to the accompanying drawings. In the following description, known functions or features will be omitted in order to clarify the gist of the present disclosure.

[0040] figure 1 is a side view showing a first embodiment in which the vacuum chamber and alignment assembly of the present invention have been installed, and figure 2 is a plan view of the stage drive of the alignment assembly of the present invention.

[0041] like figure 1 As shown, the substrate processing apparatus of the present invention may include a vacuum chamber 100 and an alignment assembly 200 .

[0042] The vacuum chamber 100 may be a part configured to perform various processes including an etching process, a CVD process, a sputtering process, an ion implantation process, an ashing process, and / or a gas phase process on a substrate 150 as an object to be processed. deposition process. The vacuum ...

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Abstract

Disclosed in the present embodiment is a substrate treatment device in which one surface of an alignment assembly for aligning a substrate and a mask is integrally formed with the body of a vacuum chamber. Therefore, provided is an alignment assembly including a plate integrally formed with a body for forming the external surface of a vacuum chamber, the alignment assembly, in comparison with a conventional assembly, reducing the work time for fine movement and alignment of a substrate and a mask, thereby improving production efficiency.

Description

technical field [0001] The present invention relates to a substrate processing apparatus, and more particularly, to a substrate processing apparatus for aligning a substrate, a mask, etc. provided in a vacuum chamber for a substrate deposition process. Background technique [0002] With the rapid development of information technology (IT) and the growth of the market for displays for smartphones and other IT equipment, flat panel displays have been in the spotlight. Examples of flat panel displays include liquid crystal displays (LCDs), plasma display panels (PDPs), organic light emitting diodes (OLEDs), and the like. [0003] In particular, OLEDs have outstanding advantages such as fast response speed, lower power consumption than conventional liquid crystal displays, light weight, high brightness, and the like. In addition, since OLEDs do not require a backlight, ultra-thin OLEDs can also be produced. [0004] OLEDs are fabricated by sequentially forming an anode, an org...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L51/56H01L51/00C23C14/24H01L21/68H01L21/67H01L21/687
CPCC23C14/24H01L21/67H01L21/687H01L21/68
Inventor 曹生贤安成一
Owner APPLIED MATERIALS INC