Surface plasma source for atmospheric discharge

A surface plasma, atmospheric pressure technology, applied in the direction of plasma, electrical components, etc., can solve the problems of low density, non-uniformity, plasma non-uniformity, etc.

Inactive Publication Date: 2003-11-19
BEIJING INSTITUTE OF GRAPHIC COMMUNICATION
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Problems solved by technology

[0004] The object of the present invention is to: provide a kind of atmospheric pressure discharge surface plasma source, on the outer surface of the mesh electrode that it does not allow to be covered by dielectric, produce stable, uniform surface plasma, it can overcome corona discharge plasma The source (with filamentary electrodes) and the dielectric barrier discharge plasma source have plasma inhomogeneity, low density, and defects that only occur in the space between the two electrodes, which can also overcome the atmospheric glow discharge surface plasma source The defects of unevenness and low ionization can further broaden the application range of plasma technology and improve its application effect

Method used

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  • Surface plasma source for atmospheric discharge
  • Surface plasma source for atmospheric discharge
  • Surface plasma source for atmospheric discharge

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Embodiment

[0015] Embodiment: further illustrate as follows in conjunction with accompanying drawing:

[0016] As shown in Figures 1, 2 and 3, the plate electrode 2 and the corresponding dielectric 3 and mesh electrode 4 can be in the shape of a plane, an arc or a wave. The mesh electrode 4 has uniform and densely distributed mesh holes 7 with the same pore size. The smaller the pore size and the higher the hole density, the more beneficial it is to increase the density, uniformity and stability of the surface plasmon 8 . When the pulse power supply 1 applies the voltage on the two electrodes, under the discharge conditions (electrode distance and air pressure), the electric field strength formed is higher than the breakdown electric field strength under the corresponding air pressure conditions, then between the dielectric 3 and Discharge occurs in the space between the mesh electrodes 4 and produces uneven plasma 6. At the same time, due to the existence of mesh holes 7, a layer of pla...

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Abstract

A surface plasma source at atomspheric discharge includes inpulse power source, sheet electrode with the dielectric covered on it and another electrode isola ted by space, a working air between the dielectric and another electrode. The electrode is a bare net shape electrode to produce the stable and homogeneous surface plasma at the outside face of the bare net shape electrode and the shape of the surface plasma can be changed according to the shape changing of the electrodes.

Description

technical field [0001] The invention belongs to the field of plasma science and technology, and relates to an atmospheric pressure discharge surface plasma source. Background technique [0002] Generally speaking, there are two types of discharge plasma sources: one is vacuum discharge, such as: glow discharge, microwave discharge, etc.; the other is atmospheric discharge, such as: corona discharge, dielectric barrier discharge, etc.; there are other classification methods : According to the temperature of the working gas, it can be divided into cold and hot plasma; according to the temperature of plasma electrons, it can be divided into high and low temperature plasma, and they have different characteristics and performances, and their applications are also different; as for atmospheric discharge plasma In other words, there are mainly two types in the prior art: one is a dielectric barrier discharge plasma source, and its discharge device is: two flat electrodes with a...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H05H1/24H05H1/46
Inventor 葛袁静张广秋赵志发
Owner BEIJING INSTITUTE OF GRAPHIC COMMUNICATION
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