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Easy-to-integrate FBAR filter

A filter and resonator technology, which is applied in the field of FBAR filters, can solve problems such as limiting the integration of FBAR filters, and achieve the effects of reducing processing costs, improving integration, and improving mechanical quality factors

Active Publication Date: 2021-06-01
武汉敏声新技术有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At the edge of the FBAR structure, the supporting feet of the Bragg reflective layer structure with lateral distribution can be improved, which can improve the mechanical quality factor of the FBAR resonator and improve the performance of the resonator itself. In addition, the construction of traditional FBAR filters often requires additional peripherals outside the FBAR resonator. The support frame enables the integration of multiple resonators, but this traditional connection method often limits the integration of FBAR filters, and the support feet of the FBAR resonators are connected by laterally distributed Bragg reflectors. Diversified distribution methods, which can be arranged horizontally or vertically, which can improve the filter filling factor, improve the integration of the filter, and reduce the processing cost

Method used

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  • Easy-to-integrate FBAR filter

Examples

Experimental program
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Effect test

Embodiment 1

[0042] figure 2 For this embodiment 1, an FBAR filter that is easy to integrate, the first resonator 6 and the second resonator 7 are connected through two circular support feet 5, and the first resonator 6 and the second resonator 7 are arranged on the Si substrate Bottom 11 on top.

Embodiment 2

[0044] image 3 An easy-to-integrate FBAR filter for this embodiment 2, the supporting feet used by the first resonator 6 and the second resonator 7 are square (quadrangle), connected by two supporting feet 5, the first resonator 6 and the second resonator Resonator 7 is arranged on Si substrate 11 .

Embodiment 3

[0046] Figure 4 For this embodiment 3, an FBAR filter that is easy to integrate, the supporting legs used by the first resonator 6 and the second resonator 7 are circular, connected by a supporting leg 5, and the relative positions of the resonators can be adjusted according to the actual situation. Adjustment, the first resonator 6 and the second resonator 7 are arranged on the Si substrate 11 .

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PUM

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Abstract

The invention provides an easy-to-integrate FBAR filter. The easy-to-integrate FBAR filter comprises a plurality of supporting legs of Bragg reflection layer structures, a first resonator and a second resonator, the first resonator and the second resonator share a plurality of supporting legs with Bragg reflection layer structures; the first resonator is formed by sequentially depositing a mass load, a first upper electrode, a first piezoelectric layer and a first lower electrode; and the second resonator is formed by depositing a second upper electrode, a second piezoelectric layer and a second lower electrode in sequence. The FBAR resonators are connected through the supporting legs to form the filter, and the resonators can form a filter passband by applying mass load frequency modulation on the upper portion of the upper electrode. The FBAR resonators are connected through the supporting legs of the Bragg reflection layer interphase structure distributed transversely, the mechanical quality factor of the FBAR resonators can be improved, the resonator arrangement mode can be diversified and can be a transverse arrangement mode or a longitudinal superposition mode, the integration degree of the filter is improved, and the processing cost is reduced.

Description

technical field [0001] The invention belongs to the technical field of filters, in particular to an easily integrated FBAR filter. Background technique [0002] With the development of modern wireless communication technology towards high frequency and high speed, higher requirements are put forward for front-end filters commonly used in radio frequency communication. While the operating frequency continues to increase, there are higher requirements for device volume, performance, stability, and integration. There are currently two main implementations of filters in radio frequency systems: SAW (Surface Acoustic Wave) filters and BAW (Bulk Acoustic Wave) filters. Compared with surface acoustic wave filters, bulk acoustic wave filters have the advantages of high operating frequency and power capacity. Among them, FBAR (film bulk acoustic resonator) filters have high frequency, low loss, low temperature drift characteristics, and steep filter skirts. Edge and extremely high ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H03H9/17H03H9/25
CPCH03H9/17H03H9/25
Inventor 孙成亮温志伟刘炎王磊曲远航龙开祥罗天成王瑶杨超翔
Owner 武汉敏声新技术有限公司
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