Easy-to-integrate FBAR filter
A filter and resonator technology, which is applied in the field of FBAR filters, can solve problems such as limiting the integration of FBAR filters, and achieve the effects of reducing processing costs, improving integration, and improving mechanical quality factors
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Embodiment 1
[0042] figure 2 For this embodiment 1, an FBAR filter that is easy to integrate, the first resonator 6 and the second resonator 7 are connected through two circular support feet 5, and the first resonator 6 and the second resonator 7 are arranged on the Si substrate Bottom 11 on top.
Embodiment 2
[0044] image 3 An easy-to-integrate FBAR filter for this embodiment 2, the supporting feet used by the first resonator 6 and the second resonator 7 are square (quadrangle), connected by two supporting feet 5, the first resonator 6 and the second resonator Resonator 7 is arranged on Si substrate 11 .
Embodiment 3
[0046] Figure 4 For this embodiment 3, an FBAR filter that is easy to integrate, the supporting legs used by the first resonator 6 and the second resonator 7 are circular, connected by a supporting leg 5, and the relative positions of the resonators can be adjusted according to the actual situation. Adjustment, the first resonator 6 and the second resonator 7 are arranged on the Si substrate 11 .
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