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95results about How to "High mechanical quality factor" patented technology

High-sensitivity dual-axis silicon-micro resonance accelerometer

The invention relates to a high-sensitivity dual-axis silicon-micro resonance accelerometer which consists of an upper mechanical part and a lower part, wherein the upper mechanical part comprises a mass block, a micro lever amplification mechanism, tuning fork resonators, an electrostatic comb actuator and a comb tooth capacitor detector; the lower part comprises a signal wire and an electrode; the upper part in the structure of the accelerometer is made on a monocrystalline silicon wafer; the lower part is made on a glass substrate; in an upper mechanical mechanism, one square mass block is adopted to sense accelerated speeds in two orthogonal directions; one ends of four resonators with the same structural parameters are fixed on a substrate through anchor points and the other ends of the resonators are connected with the mass block through a micro lever mechanism; four primary micro levers which are totally same are respectively connected at four vertex angles of the mass block; and the upper mechanical mechanism is suspended above the lower glass substrate through the anchor points at one ends of the resonators and anchor points of a fulcrum of the micro lever mechanism. The high-sensitivity dual-axis silicon-micro resonance accelerometer has the advantages of high sensitivity, strong decoupling capability, large range, high stability, small volume, simple structure and the like and is suitable for the fields of the automobile industry, the aerospace, seismic monitoring and the like.
Owner:BEIHANG UNIV

Micromachine-based electromagnetic excitation resonant pressure sensor

The invention discloses a micromachine-based electromagnetic excitation resonant pressure sensor, and relates to a micromachine sensing technology. The sensor is provided with three groups of resonators which are clamped by anchor points on a pressure membrane, arranged on a diagonal line of a frame, and provided with electrodes. The resonators applied with excitation signals are excited by magnetic field force under the action of an external magnetic field; and when pressure to be tested is present outside, the pressure membrane generates strain, and the strain is transmitted to the resonators through the anchor points to change the rigidity of the resonators, so that the natural frequency of the resonators is changed, and the pressure to be tested outside can be measured by detecting the frequency of output signals of vibration pickup electrodes. The sensor has two packaging modes, and is subjected to stress isolation through a ceramic ring of which the coefficient of thermal expansion is basically same as monocrystalline silicon. The resonators of the sensor work in a horizontal vibration mode; the shift caused by external factors such as temperature and the like is inhibited through differential output, and the sensitivity is improved; and the resonators are released by a heavy boron-diffusion self-stop corrosion technology, a process is simple and the consistency is high.
Owner:INST OF ELECTRONICS CHINESE ACAD OF SCI

Doped and modified lead zirconate-titanate piezoelectric ceramic and preparation method thereof

The invention discloses a doped and modified lead zirconate-titanate piezoelectric ceramic and a preparation method thereof. The doped and modified lead zirconate-titanate piezoelectric ceramic is shown in a following chemical formula I, namely xPb(Mg1/3Nb2/3)O3-yPb(Ni1/3Nb2/3)O3-(1-x-y)Pb(Ti1/2Zr1/2)O3+lSrCO3+mZnO+nQ, wherein Q is at least selected from Li2CO3 (lithium carbonate), CuO (copper oxide), SiO2 (silicon dioxide), MnO2 (manganese dioxide), Bi2O3 (bismuth oxide) and La2O3 (lanthanum oxide); l, m and n are respectively the mass percentages of SrCO3 (strontium carbonate), ZnO (zinc oxide) and Q in the compound Pb(Mg1/3Nb2/3)O3-Pb(Ni1/3Nb2/3)O3-Pb(Ti1/2Zr1/2)O3; x is greater than or equal to 0.10 and is smaller than or equal to 0.70, y is greater than or equal to 0.08 and is smallerthan or equal to 0.38, l is greater than 0 and is smaller than or equal to 0.5, m is greater than 0 and is smaller than or equal to 0.50, and n is greater than or equal to 0 and is smaller than or equal to 0.5. The doped and modified lead zirconate-titanate piezoelectric ceramic has the excellent properties of low sintering temperature, high electromechanical coupling coefficient, high piezoelectric strain coefficient, small dielectric loss and the like.
Owner:WEIFANG GOERTEK MICROELECTRONICS CO LTD

Biaxially-resonant silicon-micromachined accelerometer structure in shape of Chinese character 'tian'

The invention discloses a biaxially resonant silicon-micromachined accelerometer in the shape of a Chinese character 'tian' and aims at designing and manufacturing a high-sensitivity and high-resolution biaxially-resonant silicon-micromachined accelerometer. The structure is characterized in that (1) because a mass block structure in the shape of a Chinese character 'tian' is adopted, the volume of a mass block is maximized, and the acceleration can be converted into an inertial force more effectively; and the whole structure is symmetrically distributed, which is favorable for resisting noises and inhibiting temperature drift; (2) a support beam (in the shape of a Chinese character 'ji') arranged at the periphery of the structure facilitates the release of the residual stress and temperature stress of the structure, thereby reducing the support stiffness of the structure in a sensitive direction; (3) due to the application of a spring-like beam (in the shape of a Chinese character 'kou') at one end of a resonator, the influence of external shocks on the beam is reduced, and the spring-like beam plays a role in releasing the residual stress of the structure; and (4) an arc structure at the root part of a tuning fork in the resonator can be used for effectively reducing the energy coupling and improving the mechanical quality factor of the resonator, and is easy for realizationof closed-loop control.
Owner:BEIHANG UNIV

In vivo ultrasound lithotripter

The invention relates to an intracorporal ultrasonic lithotripter consisting of an ultrasonic transducer and an automatic frequency tracking system, wherein, the ultrasonic transducer comprises more than two groups of piezoelectric ceramic pieces, a counterweight, the piezoelectric ceramic pieces and an amplitude transformer are connected together through hollow bolts, and the ultrasonic transducer is installed in the housing handle made of fire-resistant resin materials. A broken stone probe is connected with the front end of the amplitude transformer, a back cover is connected with the back end of the housing handle by screw threads, a pneumatic stone breaking device or a laser stone breaking device can be connected after the back cover is took down, an air regulation device which can regulate the adsorptive pressure in the operation process conveniently is installed on the side of the back end of the housing handle. The whole transducer can be fumigated in 125 DEG C. The automatic frequency tracking system adopts DDS and large-scale programmable devices, a direct digital frequency synthesizer to generate driving signals of the ultrasonic transducer and a strategy of autotracking after scanning search, thus, the automatic frequency tracking system adapts to the discreteness of the transducer and overcomes effects of a variety of causes on the resonance points.
Owner:BEIJING ANHEJIALIER TECH CO LTD

Piezoelectric pump driven by piezoelectric composite beam with adjustable resonant frequency

The invention relates to a piezoelectric pump driven by a piezoelectric composite beam with an adjustable resonant frequency, and belongs to the technical field of piezoelectric pumps. The piezoelectric pump comprises a driving mechanism and a single diaphragm pump; the driving mechanism comprises a piezoelectric composite beam mechanism with the adjustable resonant frequency; the piezoelectric composite beam mechanism comprises an elastic straight beam, two pairs of piezoelectric patches and a pair of mass blocks; one pair of piezoelectric patches are arranged on the upper and lower surfaces of the left side of the center of the elastic straight beam, and the other pair of piezoelectric patches are arranged on the upper and lower surfaces of the right side of the center of the elastic straight beam to form a piezoelectric bimorph structure and are symmetrically positioned on the elastic straight beam; all the piezoelectric patches are connected in series or in parallel through wires; and the diaphragm pump is fixedly connected to a central mounting hole of the elastic straight beam through a bolt. According to the piezoelectric pump, the resonant frequency of the piezoelectric composite beam mechanism can be adjusted by changing the size of the mass blocks so that the resonant frequency can be matched with the optimal working frequency of the one-way valve, both the piezoelectric composite beam mechanism and the one-way valve are ensured to work in the optimal state, and therefore the output performance and the working efficiency of the piezoelectric pump are improved.
Owner:HEFEI UNIV OF TECH

Piezoelectric pump driven by tuning fork type actuator with adjustable resonant frequency

The invention relates to a piezoelectric pump driven by a tuning fork type actuator with adjustable resonant frequency, and belongs to the technical field of piezoelectric pumps. The piezoelectric pump comprises the tuning fork type piezoelectric actuator with adjustable resonant frequency and a pair of diaphragm pumps, and the tuning fork type piezoelectric actuator comprises an inverted U-shaped tuning fork type body and piezoelectric plates which are bonded and fixed on the surface of the tuning fork type body; and the tuning fork type body is composed of a cross beam, a pair of driving arms, a mass block at the lower ends of the driving arms and an additional mass block fixedly connected to the bottom of the mass block through bolts. The piezoelectric plates are respectively arranged on the top surface and the bottom surface of the cross beam and the inner side surfaces and the outer side surfaces of the pair of driving arms to form three pairs of piezoelectric bimorph structures; and the pair of diaphragm pumps comprises two diaphragm pumps which are fixedly connected together in a back-to-back mode and are fixedly arranged between the pair of driving arms of the tuning fork type body through kidney-shaped holes and bolts. According to the piezoelectric pump, the resonant frequency of the tuning fork type piezoelectric actuator can be adjusted in a large range by changing the size of the additional mass block, so that the resonant frequency is matched with the optimal working frequency of a one-way valve, and the output performance of the piezoelectric pump is improved.
Owner:HEFEI UNIV OF TECH

Large power ultrasonic sensor

The invention relates to a large power ultrasonic sensor and relates to the piezoelectric ceramic and ultrasonic sensor technology. The large power ultrasonic sensor comprises a metal cylinder body, a piezoelectric ceramic sheet and a circuit board. Raw materials of the piezoelectric ceramic sheet is further added with magnesium oxide, scandium oxide, ferric oxide and alumina, the piezoelectric ceramic sheet is bonded with the bottom board of the metal cylinder body through a high temperature resistance bonding agent, one face of the piezoelectric ceramic sheet is printed with one layer of high temperature resistance bonding agent through a screen, the diameter of the metal cylinder body is not smaller than 25mm. The property of the ceramic material turns hard, the piezoelectric ceramic sheet during operation generates heat which does not cause depolarization, the piezoelectric ceramic sheet is enabled to be more stable in the high temperature work environment, according to the large power ultrasonic sensor, performance is greatly improved, electromechanical coupling coefficient (KP) is not smaller than 60%, Tang loss is not greater than 0.5%, dielectric constant sigma is equal to 1700+ / -200, and a quality factor (QM) is equal to 1100+ / -200.
Owner:广东思威特智能科技股份有限公司
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