Mixed coordination metal carbon nano-film hydrogel flexible bending sensing unit, preparation method thereof and flexible bending sensor
A carbon nano-film, hydrogel flexible technology, applied in the field of flexible sensing, can solve the degradation of the sensitivity and detection range performance of hydrogel sensors, the inability of hydrogel sensors to form a uniform conductive network, and the inability to obtain conductive network hydrogels Sensors and other issues to achieve accurate measurement, stable performance, and high sensitivity
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[0030] The present invention provides a mixed-coordination metal carbon nano-film hydrogel flexible bending sensor unit and its preparation method, and a flexible bending sensor. In order to make the purpose, technical scheme and effect of the present invention clearer and clearer, the present invention is further detailed below illustrate. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.
[0031] see figure 1 , figure 1 The flow chart of a preferred embodiment of the preparation method of a mixed-coordination metal carbon nano-film hydrogel flexible bending sensing unit provided by the present invention, as shown in the figure, includes steps:
[0032] S10, using titanium and carbon as double targets, using microwave plasma double-target magnetron sputtering technology to generate a mixed-coordination metal carbon nanofilm, the mixed-coordination metal carbon nanofilm inc...
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