Laser beam adjustment system and laser processing apparatus

Abstract

The invention provides a laser beam adjustment system and a laser processing device, which can easily adjust a laser beam. The laser beam adjustment system for adjusting a laser beam to a parallel light. The system includes a beam adjustment unit having a plurality of lenses arranged in an optical path of the laser beam and, first and second mirrors that reflect the laser beam having passed through the beam adjustment unit, first and second cameras configured to capture images of a first light having passed through the first mirror and a second light having passed through the second mirror, calculation sections configured to calculate first and second beam diameters of the first light and second light from the images captured by the first and second cameras, and a lens adjustment section configured to move one of the lenses of the beam adjustment unit in a direction parallel to the optical path of the laser beam so that the first and second beam diameters match each other.

Description

technical field [0001] The invention relates to a laser beam adjustment mechanism and a laser processing device. Background technique [0002] In a laser processing apparatus that processes a workpiece by irradiating a laser beam, there is a mechanical error in which the beam diameter of the laser beam emitted from the laser oscillator differs for each laser oscillator. Therefore, a beam expander is used to adjust the beam diameter of the laser beam to a predetermined diameter and to adjust the laser beam to parallel light. [0003] The beam expander adjusts the laser beam to parallel light, and adjusts the beam diameter of the beam to a prescribed size. By using the beam expander, the beam diameter of the laser beam emitted from the laser oscillator can be made substantially uniform among devices. Therefore, mechanical errors of each laser processing device can be reduced. [0004] In the beam expander, as disclosed in Patent Document 1, a first concave lens, a convex le...

AI Technical Summary

Problems solved by technology

Therefore, adjustment of the laser beam by the beam expander takes labor and time

[0008] In addition, since parallel light adjustment and beam diameter adjustment using a photoreceptor are performed before processing, it is difficult for the operator to notice that the laser beam is no longer parallel or the beam diameter changes during processing.

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