Unlock instant, AI-driven research and patent intelligence for your innovation.

A Diffusion Method Applicable to LDSE Technology

A diffusion method and technology, which is applied in the field of solar cells, can solve the problems of low metal contact area and affect the improvement of battery performance, and achieve the effects of reducing square resistance, improving Eff, and reducing Rs and FF losses

Active Publication Date: 2022-08-09
CSI CELLS CO LTD +1
View PDF4 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, it is difficult to reduce the metal contact region Rs to a lower value after heavy doping, which affects the improvement of its battery performance.

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • A Diffusion Method Applicable to LDSE Technology
  • A Diffusion Method Applicable to LDSE Technology
  • A Diffusion Method Applicable to LDSE Technology

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0050] This embodiment provides a diffusion method suitable for laser doping technology, including the following steps:

[0051] The silicon wafer is textured to form a light-trapping structure textured surface. After texturing, the silicon wafer enters a diffusion furnace for single-sided diffusion. The diffusion surface is an N-type emitter, and the back is a P-type surface to form a PN junction.

[0052] The diffusion process includes the following steps:

[0053] (1) Open the furnace door: the atmosphere conditions are, BN 2 (flow 3000sccm), SN 2 (flow 0), BO 2 (flow 3000sccm), SO 2 (flow 1000sccm), pressure (1060mbar);

[0054] (2) Entering the boat: the atmospheric conditions are, BN 2 (flow 3000sccm), SN 2 (flow 0), BO 2 (flow 0), SO 2 (flow 0), pressure (1060mbar);

[0055] (3) Heating up: BN 2 (flow 0), SN 2 (flow 0), BO 2 (flow 0), SO 2 (flow 0), pressure (100mbar);

[0056] (4) Pre-oxidation: BN 2 (flow 0), SN 2 (flow 0), BO 2 (flow 0), SO 2 (flow ...

Embodiment 2-5

[0067] Change the temperature and time of each step, see Table 1 for details.

Embodiment 6

[0069] Except that the cooling rate was adjusted to 0.3°C / min, other methods and conditions were the same as in Example 1.

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

PropertyMeasurementUnit
thicknessaaaaaaaaaa
thicknessaaaaaaaaaa
Login to View More

Abstract

The invention discloses a diffusion method suitable for laser doping technology, which is characterized in that in the process of cooling and oxidation, the controlled atmosphere is pure O 2 Atmosphere, the silicon dioxide grown on the surface of the diffusion layer reacts with the phosphorus source doped on the surface to form a 40-50nm thick phosphosilicate glass, and a post-oxidation step is performed after the cooling and oxidation, and the atmosphere is controlled to be pure during the post-oxidation process. O 2 atmosphere. On the one hand, reducing the surface active doping concentration reduces the recombination of minority carriers, thereby increasing Voc and Isc; Rs and FF loss, maximize the Eff of the battery.

Description

technical field [0001] The invention belongs to the field of solar cells, and relates to a diffusion method suitable for LDSE technology. Background technique [0002] With the intensified competition in the crystalline silicon market, various crystalline silicon cell manufacturers are using various methods to improve the photovoltaic performance of cells. Among them, it is a common way to improve the Voc and Isc of the battery by optimizing the diffusion process to increase the square resistance and stacking the laser doping selective emitter (LDSE) technology. This is because high square resistance corresponds to a lower surface active doping concentration, which can effectively reduce the surface minority carrier recombination and improve the minority carrier lifetime; at the same time, it can enhance the short-wave response of the emitter and improve the Isc. However, conventional LDSE diffusion simply increases the square resistance to improve Voc and Isc, and the gain...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Patents(China)
IPC IPC(8): H01L31/18H01L21/223
CPCH01L31/186H01L21/223Y02P70/50
Inventor 张美荣陈曦张达奇吴坚蒋方丹
Owner CSI CELLS CO LTD