The invention provides a method for carrying out
boron diffusion on
monocrystalline silicon, which comprises the following steps: carrying out pretreatment on
monocrystalline silicon, and growing a
boron-loving thin film layer to obtain
monocrystalline silicon of which the surface is a
boron-loving thin film layer; reacting the monocrystalline
silicon with the boron-loving thin film layer on the surface in the presence of
oxygen and a boron source to obtain a B2O3 thin film layer covering the boron-loving thin film layer; the method comprises the following steps: carrying out a first
boron diffusion reaction on monocrystalline
silicon subjected to two times of film layer growth under an
oxygen-free condition, carrying out cooling and film removal, carrying out a second
boron diffusion reaction in the presence of
oxygen, and carrying out a boron
elimination reaction on the monocrystalline
silicon under
nitrogen and
hydrogen conditions to obtain the boron-diffused monocrystalline silicon. According to the invention, the boron-loving thin film layer and the
hydrogen-assisted propulsion technology are utilized, a deep PN junction and a high-sheet-resistance
boron diffusion effect are realized under the condition that the temperature does not exceed 940 DEG C, the damage of high temperature to the silicon
wafer body is effectively avoided, the conversion efficiency of the
solar cell is improved, and convenience is provided for subsequent production of the
solar cell with a complex structure.