The invention discloses a decompression diffusion technology for manufacturing high-square-resistance battery pieces. The technology comprises a constant-temperature decompression process, a pre-oxidation process, a temperature rise process, a deep diffusion process, a phosphorus propulsion process, a post-oxidation treatment process and a temperature drop and pressure rise process. Compared with a constant-pressure diffusion technology, the variable of pressure in the diffusion process is introduced into the decompression diffusion technology, the pressure in a diffusion furnace tube is reduced, meanwhile temperature, time and airflow are adjusted so that the uniformity of the diffusion square resistance can be better, and the photovoltaic conversion efficiency of the manufactured battery pieces can be higher; besides, the yield in unit time of equipment can be increased, and the usage amount of diffusion phosphorus sources is reduced.