Surface acoustic wave high-temperature pressure sensor
A pressure sensor and surface acoustic wave technology, applied in the field of micro-electromechanical system sensors, can solve the problems that wired sensors cannot be used, pressure sensors cannot, and wireless measurement, etc., and achieve the effects of improving measurement sensitivity, improving sensitivity, and good thermal stability.
Pending Publication Date: 2021-06-11
XI AN JIAOTONG UNIV
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Problems solved by technology
[0008] In addition, in industrial production activities, it is often necessary to measure pressure in some special environments, such as closed environments, high-temperature environments, etc. Usually, such environments cannot be measured by wired sensors, and wireless pressure sensors are very suitable for this. environment, and the above pressure sensors cannot perform wireless measurement, and cannot solve the existing problems
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[0051] Next, the technical solutions in the embodiments of the present invention will be described in contemplation in the embodiment of the present invention, and it is clear that the described embodiments are intended to be in an embodiment of the invention, not all of the embodiments of the invention. Based on the embodiments of the present invention, there are all other embodiments obtained without making creative labor without making creative labor premises.
[0052] In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "horizontal", "upper", "lower", "front", "post", "left", "right", " Vertical "," horizontal "," top "," bottom "," inside "," outside "," one side "," one end "," one side "orientation is based on the drawing The orientation or positional relationship is intended to facilitate the description of the present invention and simplified description, rather than indicating or implying that the referred to means ...
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A surface acoustic wave high-temperature pressure sensor disclosed by the present invention is characterized in that a sensor chip is arranged in an alloy shell, a pressure sensitive film is arranged at the alloy shell above the sensor chip, the pressure sensitive film is connected with the sensor chip through a force transmission thimble, a receiving antenna is arranged in the alloy shell at one side of the sensor chip, and a transmitting antenna is correspondingly arranged on the other side. According to the invention, high-temperature pressure measurement can be carried out in a severe environment, wireless and passive effects can be achieved, the sensitivity is high, the stability is high, the cost is low, and mass production is easy.
Description
Technical field [0001] The present invention belongs to the microelectromechanical system (MEMS) sensor technology, and more particularly to a sound surface wave high temperature pressure sensor. Background technique [0002] Pressure sensors are the most widely used in various sensors, depending on the measurement principle and the preparation process, the pressure sensor can be divided into various types, capacitive and optical fiber, etc., its shape, accuracy and application range Each is different. [0003] In recent years, with the rapid development of defense industries, aviation, aerospace, and automobiles, energy chemical and other industries urgently need high temperature pressure sensors to solve the problem of pressure measurement in high temperature environments. For example, pressure measurement, engine pressure measurement, aerospace aircraft, spacecraft in the high temperature environment in oil wells, pressure monitoring of various heat-resistant components such a...
Claims
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Login to View More IPC IPC(8): G01L1/16G01L1/25G01L9/08G01L11/04
CPCG01L1/165G01L1/255G01L9/08G01L11/04
Inventor 韦学勇王雨晨李兵任子明赵明辉蒋庄德
Owner XI AN JIAOTONG UNIV