High-precision angle testing method for silicon-based Micro OLED micro display

Abstract

The invention discloses a high-precision angle testing method for a silicon-based Micro OLED micro display. The high-precision angle testing method comprises the following steps: 1) determining that a lens of a spectrograph is vertical to an A axis of a platform; (2) searching a mechanical circle center of an axis B, (3) setting mechanical original points of five axes, (4) carrying out angle fitting, and (5) obtaining coordinates of X, Y and Z when an actual product is placed on the platform. Compared with the prior art, the five-axis angle testing method provided by the invention has the advantages of low cost and high precision (1-2 [mu]m level), and can be used for testing any angle of a small-size product.

Description

technical field [0001] The invention relates to the field of silicon-based Micro OLED microdisplays, in particular to a high-precision five-axis angle testing method for a silicon-based Micro OLED microdisplay at low cost using an algorithm. Background technique [0002] Silicon-based Micro OLED microdisplay devices are OLED display devices made of single crystal silicon as the active driving backplane, which are different from conventional AMOLED devices that use amorphous silicon, microcrystalline silicon or low-temperature polysilicon thin-film transistors (LPTS) as the backplane , whose pixels are 1 / 10 of traditional display devices, and have the advantages of high resolution, high integration, low power consumption, small size, and light weight. [0003] The traditional low-temperature polysilicon LTPS-OLED display can only achieve a resolution of 800PPI and a refresh rate of 120HZ, so it is prone to dizziness, while silicon-based Micro OLED is mounted on a high-purity ...

AI Technical Summary

Problems solved by technology

But in fact, there is a certain deviation in the radius of rotation at different measurement angles

The main reasons for this error are as follows: (1), due to the compatibility between the X, Y, and Z axes on the test instrument and the A, B axes of the product placement platform below; (2), the mechanism assembly process (3) Due to the mechanism error in the installation of the spectrometer itself; (4) There is a certain mechanism error when the product is placed, such as not an absolute level, etc.

[0006] Due to the above reasons, there are inevitable mechanism errors, and these mechanism errors will cause a certain rotation angle error during the angle test; at the same time, because the product itself is too small (6mm), it can be clearly seen when viewed under a multi-fold magnifying glass. It is seen that the deviation between the test point and the product center is relatively large, the error is about 0.5-1mm, and the error of 0.5-1mm (500um~1000um) is already very large on this type of product, and the actual allowable error is 1um~2um

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