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Image detection device and detection method using same

The technology of an image detection device and detection method is applied in the direction of measuring device, photoplate making process of patterned surface, heat measurement, etc., which can solve the problems of unstable exposure marks and achieve the effect of accurate discoloration

Inactive Publication Date: 2021-06-22
锡凡半导体无锡有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] In view of the above-mentioned related technologies, the inventor believes that: photosensitive materials are easily affected by external stray light, resulting in unstable exposure marks

Method used

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  • Image detection device and detection method using same
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Embodiment Construction

[0041] The following is attached Figure 1-2 The application is described in further detail.

[0042] The embodiment of the present application discloses an image detection device. refer to figure 1 , an image detection device includes a substrate 1, the substrate 1 is a square rod, and the surface of the substrate 1 is coated with a thermochromic material 2. In order to facilitate uniform coating of the thermochromic material 2 , the surface of the base 1 is smooth and flat, and the material of the base 1 is preferably glass or metal.

[0043] refer to figure 1 , the thermochromic material 2 is an electron transfer type organic compound, and is a kind of organic chromogenic system with a special chemical structure. Electron-transfer-type organic compounds change the molecular structure of the organic compound due to electron transfer at a specific temperature, thereby realizing color transformation.

[0044] refer to figure 1 , the thermochromic material 2 is light red ...

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Abstract

The invention relates to the field of laser imaging, in particular to an image detection device and a detection method applying the image detection device. The image detection device comprises a base, the base is a square rod, and the surface of the base is coated with a thermochromic material. According to the technical scheme, the detection method comprises the steps of initial positioning: fixing a base to a suction cup; repositioning: moving the substrate to a position below the light emitting lens; laser focusing: adjusting the position of the substrate to enable the laser to be projected on the thermochromic material; laser imaging: the laser forms a red image on the thermochromic material; image acquisition: moving the substrate to a position below an alignment camera, and capturing the red image by the alignment camera; and image comparison: the alignment camera transmits the obtained red image to a comparison system to compare the red image with an original image, and the comparison system outputs a result. The image detection device has the effect of improving the stability of the color-changing mark, so that the image calibration of the laser direct-writing photoetching equipment is facilitated.

Description

technical field [0001] The present application relates to the field of laser imaging, in particular to an image detection device and a detection method using the image detection device. Background technique [0002] LDI (laser direct imaging) laser direct imaging technology is used in the pattern transfer process in the PCB process. It is different from the traditional film contact exposure method. Laser direct imaging directly uses laser to image the Gerber data image on the printed circuit board. Gerber files are descriptive vector files. There are often thousands of lines and pads in general files, and the data capacity is huge. [0003] Laser direct writing lithography equipment includes a suction cup, a light-emitting lens, an alignment camera, and a drive mechanism that controls the movement of the suction cup, positioning the printed circuit board on the suction cup, and emitting laser light from the light-emitting lens to image the printed circuit board. Laser direct...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G03F9/00G01K11/12
CPCG03F9/7049G03F9/7084G03F9/7088G03F9/7096G01K11/12
Inventor 霍大云张斌刘麟跃刘伟
Owner 锡凡半导体无锡有限公司
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