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High-precision step surface shape measurement method and device based on spectral confocal

A spectral confocal and measurement method technology, applied in the field of high-precision step-by-step surface shape measurement methods and devices, can solve problems such as poor stability, low measurement accuracy, and long measurement time, achieve strong stability, realize three-dimensional shape, Effect of Accuracy Improvement

Active Publication Date: 2021-06-25
CENT SOUTH UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] The present invention provides a high-precision step-by-step surface shape measurement method and device based on spectral confocal. Long measurement time, low measurement accuracy, poor stability, and easy distortion of shape reconstruction

Method used

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  • High-precision step surface shape measurement method and device based on spectral confocal
  • High-precision step surface shape measurement method and device based on spectral confocal
  • High-precision step surface shape measurement method and device based on spectral confocal

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Embodiment 1

[0033] Such as figure 1 As shown, the embodiments of the present invention provide a high-precision step-by-step surface shape measurement method based on spectral confocal, including:

[0034] Step 1, using the scanning probe to irradiate the line spectrum;

[0035] Step 2, according to the scan width of the scan line spectrum, the upper surface of the measurement object is divided into a plurality of unit areas of corresponding width;

[0036] Step 3: Scan each unit area separately by moving the scanning probe; when scanning the unit area, the line spectrum is perpendicular to the scanning movement direction of the three-dimensional motion platform, and the scanning probe moves from one end section of the unit area to the other end section for preliminary Scanning, after preliminary scanning, rotate the scanning probe and the line spectrum by an angle θ, and 0°<θ<180°, in this embodiment, θ=90°, and move to the initial position, the scanning probe is cross-sectional from on...

Embodiment 2

[0043] Such as Figure 8 As shown, the embodiments of the present invention provide a high-precision step-by-step surface profile measurement device based on spectral confocal, including: a measurement platform 1, a three-dimensional motion platform is arranged on the measurement platform 1, and the three-dimensional motion platform is set There are X-direction slide table 2, Y-direction slide table 3 and Z-direction slide table 4, said Z-direction slide table 4 is provided with an angle adjustment mechanism 5, and the bottom of said angle adjustment mechanism 5 is provided with a scanning probe 6, said The scanning probe 6 is provided with a line spectrum displacement measurement system, and the line spectrum displacement measurement system irradiates a line spectrum 7 .

[0044] The high-precision step-by-step surface shape measurement device based on spectral confocal described in the above-mentioned embodiments of the present invention, the measurement platform is used to ...

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Abstract

The invention provides a high-precision step surface shape measurement method based on spectral confocal. The method comprises the following steps: irradiating a line spectrum by using a scanning probe; dividing the upper surface of the measurement object into a plurality of unit areas with corresponding widths according to the scanning width of the scanning line spectrum; enabling the line spectrum to move from the section of one end of the unit area to the section of the other end in the direction perpendicular to the scanning motion direction of the three-dimensional motion platform for primary scanning, rotating the scanning probe and the line spectrum by an angle theta and moved to the initial position, and enabling the scanning probe to move from the section of one end of the unit area to the section of the other end for secondary scanning; collecting measurement data of primary scanning and measurement data of secondary scanning; calibrating the measurement data of the primary scanning of the same unit area by using the measurement data of the secondary scanning of the same unit area; and reconstructing the three-dimensional shape of the upper surface of the measured object by using the calibrated measurement data subjected to preliminary scanning. The invention further provides a high-precision step surface shape measuring device based on spectral confocal.

Description

technical field [0001] The invention relates to the technical field of surface shape measurement, in particular to a high-precision step-by-step surface shape measurement method and device based on spectral confocal. Background technique [0002] The spectral confocal displacement sensor is a device that establishes the correspondence between distance and wavelength through the principle of optical dispersion, and uses a spectrometer to decode spectral information to obtain position information, such as figure 1 As shown, the light emitted by the white light LED light source can be approximately regarded as a point light source after passing through the fiber coupler. After being focused by the collimation and dispersion objective lens, spectral dispersion occurs, forming a continuous monochromatic light focus on the optical axis, and each monochromatic light The distance from the light focus to the measured object is different. When the measured object is at a certain posi...

Claims

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Application Information

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IPC IPC(8): G01B11/24
CPCG01B11/24G01B21/045
Inventor 段吉安罗志周海波
Owner CENT SOUTH UNIV
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