Preparation method of graphene-based dual-channel flexible polymorphic stress sensor

A sensor and graphene technology, applied in the direction of instruments, measuring force, measuring devices, etc., can solve the problem that the sensor is susceptible to interference, and achieve the effect of optimizing the stress detection range

Active Publication Date: 2021-06-25
UNIV OF ELECTRONICS SCI & TECH OF CHINA
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Used as a wearable sensor for human body signal detection, thes

Method used

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  • Preparation method of graphene-based dual-channel flexible polymorphic stress sensor
  • Preparation method of graphene-based dual-channel flexible polymorphic stress sensor
  • Preparation method of graphene-based dual-channel flexible polymorphic stress sensor

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Embodiment Construction

[0019] The present invention will be described in further detail below in conjunction with the accompanying drawings and embodiments.

[0020] This embodiment provides a graphene dual-channel wearable multi-state stress sensor applied to palm movement monitoring, and the wearable sensor is attached to the jaw of a human body. The specific implementation method is as follows:

[0021] (1) Preparation of PDMS substrate

[0022] Use l-edit to draw a square grid pattern with a line width of 30 μm and a grid side length of 100 μm. The total area of ​​the pattern is 1.5cmx1.5cm. A mask is prepared by photolithography for subsequent dry etching. The silicon wafer was dry-etched with an etching depth of 50 μm, and a silicon wafer having a square groove array with a side length of 100 μm and a depth of 50 μm was obtained after degelling.

[0023] Mix epoxy resin structural glue (PDMS A glue) and acrylate structural glue (PDMS B glue) at a volume fraction of 10:1, and stir evenly with...

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Abstract

The invention discloses a preparation method of a graphene material based on a surface microstructure flexible substrate, provides a dual-channel flexible polymorphic stress sensor structure, which relates to a flexible polymorphic stress sensor structure and preparation. The sensor comprises upper and lower flexible substrates, upper and lower sensitive layers, upper and lower electrode layers and a packaging structure. The lower flexible substrate and the lower sensitive layer are a PDMS substrate subjected to surface microstructuring treatment and a graphene film formed on the surface of the PDMS substrate, and the lower flexible substrate and the lower sensitive layer are prepared through PDMS reverse molding and graphene brushing. The upper electrode layer comprises a silver electrode C and an electrode leading-out end thereof, and the lower electrode comprises silver electrodes A and B and electrode leading-out ends thereof. The prepared dual-channel sensor is used for realizing simultaneous detection of pressure and stress signals, and distinguishing and judging of human body actions under complex strain conditions such as joint bending, external force pressing and skin stretching can be realized. Meanwhile, the graphene material based on the surface microstructure flexible substrate is adopted, so that the stress detection range adapted to the sensor is optimized, and the sensor can work normally when human joints move freely.

Description

technical field [0001] The invention belongs to the field of flexible pressure sensors, and in particular relates to the structure and preparation method of a dual-channel flexible multi-state stress sensor based on surface microstructure flexible substrate graphene. Background technique [0002] With the accelerated pace of life in modern society, people hope to detect their physical condition more conveniently and closely through scientific and technological means. In order to realize this demand, the research and development of various flexible wearable sensors is essential. Through wearable mechanical sensors, various physiological signals and body movements can be monitored conveniently and continuously, such as pulse, heart rate, joint activities, etc., and can provide effective information for scenarios such as athlete training and injury rehabilitation. Graphene is a good sensitive material. It is non-toxic, easy to manufacture, and has excellent electromechanical pr...

Claims

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Application Information

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IPC IPC(8): G01L1/22
CPCG01L1/2287
Inventor 黄文李奕奕龚天巡林媛张晓升
Owner UNIV OF ELECTRONICS SCI & TECH OF CHINA
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